mahnaz at stanford.edu
Tue Oct 23 16:43:57 PDT 2007
I am sending this email from Alex's behalf.
Asml requesting AZ Barli-ll 200 as an anti reflectivity coating material.
I have been given a hard copy of the MSDS which will be in my office if
any one would like to take a look.
Main components are Ethyl lactate and 1-Methoxy-2-Propanol.
The chemicals will be used in KS coater when the system will be up and
no other places as of right now.
More information about the specmat