AMAT DPS Etcher, Mirra CMP and Disco Grinders

Christopher Detrick chris.detrick at global-fab.com
Thu Oct 25 00:34:16 PDT 2007


~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

Global Fab Surplus
~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

October 25, 2007
~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

Greetings!
Global Fab Surplus has an AMAT DPS etcher available for immediate sale. The system
is still running production and will be removed from the fab in the next few weeks.
This system has the second generation Centura frame, VBS+ robot, two ASP+ chambers,
and more. It is in excellent condition and we are pricing it to sell very fast. 
For more information please contact us right away.
Also available for immediate sale are:

* Two Disco 840 Grinders
* ASML Twinscan stepper (vintage 2003, 300mm)
* IPEC 372 oxide CMP (two available)
* AMAT Mirra with Track
~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

AMAT Centura DPS Etcher

Process Metal Etch Process
Software Version E4.3
System Power Rating 208VAC 3Phase 4W
Loading Configuration 2 loaders config
Equipment manuals available? Yes
Tool under OEM service contract? Yes
Description Chemicals / Gases Used Photo Attached
Chm Position 1 Etch Chamber A CL2, BCL3, CF4, N2,
Ar, CHF3, NF3, O2
Chm Position 2 Etch Chamber B CL2, BCL3, CF4, N2,
Ar, CHF3, NF3, O2
Chm Position 3 Strip Chamber C NH3, CF4, N2, O2
Chm Position 4 Strip Chamber D NH3, CF4, N2, O2
Chm Position ___ Orienter Chamber F N2
Chm Position ___ Cooldown Chamber E N2

PLATFORM
TYPE
1 Etch 5200 Legacy Centura 1
Common Mainframe

CHAMBER
POSTION 'A'
2 Metal A1, DPS R1 1
includes ESC, heated turbo pump and foreline and 6 gas
lines default.
includes Vpp and Tc monitoring at the wafer and dome
lift.

CHAMBER
POSTION 'B' 1
3 Metal A1, DPS R1
includes ESC, heated turbo pump and foreline and 6 gas
lines default.
includes Vpp and Tc monitoring at the wafer and dome
lift.

CHAMBER
POSTION 'C'
6 ASP+ 1
Includes chuck type process kit for improved thermal
stability

CHAMBER
POSTION 'D'
7 ASP+ 1

CHAMBER
POSTION 'E'
8 Cooldown Chamber 1

CHAMBER
POSTION 'F'
9 (OA) Orienter Chamber 1

Wafer
Orienter chamber postion F

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

Thank you for taking the time to read our email. Please feel free to forward the
 email to anyone who may be interested any of these tools.

Sincerely,

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

Chris Detrick (California)
805-215-9188
chris.detrick at global-fab.com
David Lee (Colorado)
719-686-0128
support at global-fab.com
Global Fab Surplus


~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~
Forward email
http://ui.constantcontact.com/sa/fwtf.jsp?m=1101401002153&ea=specmat@snf.stanford.edu&a=1101856074716


This email was sent to specmat at snf.stanford.edu,
by chris.detrick at global-fab.com

Update Profile/Email Address
http://visitor.constantcontact.com/d.jsp?p=oo&m=1101401002153&ea=specmat%40snf.stanford.edu&t=1101856074716&lang=en&reason=F

Instant removal with SafeUnsubscribe(TM)
http://visitor.constantcontact.com/d.jsp?p=un&m=1101401002153&ea=specmat%40snf.stanford.edu&t=1101856074716&lang=en&reason=F

Privacy Policy:
http://ui.constantcontact.com/roving/CCPrivacyPolicy.jsp




Global Fab Surplus | 195 Kirkstone Lane | Colorado Springs | CO | 80906
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20071025/28e1267b/attachment.html>


More information about the specmat mailing list