Mary Tang mtang at
Fri Oct 26 14:12:38 PDT 2007

Hi all --

I think this should be OK.  Toluene has a PEL of 200 ppm (for 
comparison, so does methanol.)  Just warnings about observing proper 
chemical handling procedures as per all-litho (work in exhausted areas 
of wet benches, dispose of solid waste in sealed bags, etc. -- the stuff 
smells) and making sure this is used no differently than other PMMA 
solutions should be sufficient.


Anika Kinkhabwala wrote:
> Hi,
> I am looking to bring in PMMA dissolved in common solvent Toluene 
> instead of Anisole.  Is it appropriate for me to fill out all of the 
> details on the following webpage:
> http://snf/Materials/NewMatProc.html
> Just wanted to be sure before I looked up all of the appropriate 
> information.  Also, if you know offhand whether or not this will be a 
> problem to bring in, that would be helpful.
> Thanks!
> -Anika

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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