Initial discussion on working with SNF for processing PbS

Mahnaz Mansourpour mahnaz at stanford.edu
Fri Oct 26 15:41:56 PDT 2007


we do not know what kind of lab practice they have, I like to reserve 
the right for chloroform till I see how they work.
mahnaz

Mary Tang wrote:

> Hi all --
>
> I just spoke with Jess and Jim Kruger.  Jim is doing the work.  
> Envisage would like to use our wafersaw/cmp room to spin coat or dip 
> wafers in PbS nanoparticles from various solvents and then do some dry 
> etching in the lab.  The  encapsulation is not likely to be done here 
> since we do not have the capability they need.
>
> I think that as long as they have good handling practices and don't 
> store a lot of chemicals here, it would be OK for them to use the 
> solvent bench and spin coater there as needed.  Jim is advising them 
> on the dry etching and will keep them honest.  The only chemical I 
> have some mild qualms over is chloroform, since its PEL is quite low, 
> but if it's in the utility room and they are careful, I think it's not 
> really too much of a problem.
>
> What do you all think?  They want to join safety training on Monday.
>
> Mary
>
> Rick Clayton wrote:
>
>> Hello;
>> My name is Rick Clayton, and I am VP of Advanced Materials for 
>> InVisage Technologies, an early stage (still stealth mode) technology 
>> company working on advanced electronics.
>> We wish to do work within the SNF, and I want to start the process of 
>> material approval prior to full engagement.
>>  
>> Many of the detailed questions below are more applicable once we are 
>> more familiar with your facility, but I will provide a top level 
>> description here as a first step in the process of getting our 
>> material approved.
>>  
>> Core material: PbS
>> associated other materials: Thiols (Mercaptans): Ethane Thiol, Ethane 
>> DiThiol, Benzene Thiol (may include other thiols in the future)
>> process chemicals: toluene, chloroform, acetonitrile, acetone, hexane
>>  
>> Incoming material:
>> The PbS would be in either powder or solution (toluene, chloroform, 
>> hexane, or other non-polar solvent). Typically we would use about 
>> 50-100 ml of our material per day.
>>  
>> a rough process flow:
>> Our device involves spinning films of PbS onto a substrate (usually a 
>> Si wafer), doing some solution processing of the wafer with the 
>> thiols, depositing masking materials, etching the PbS film, and then 
>> depositing encapsulation materials.  Once the wafer is finished we 
>> may either die saw or test at wafer level. We will be developing 
>> solvent systems and spin profiles to optimize our films.
>> We will be developing masking and etch processes
>> We will be developing encapsulation processes
>>  
>> ----------------------------------------------
>> Please provide as much information as you can about your chemical or 
>> material. It may very well be the first time anyone on the SpecMat 
>> committee has heard of this chemical/material, so it will be your 
>> responsibility to educate us. We also have a large archive of 
>> chemicals and materials that have been approved, so we may also be 
>> able to help you in selecting a chemical or process
>>  
>>
>>    1. *Your contact information:* Name, Coral login, phone number,
>>       email address and who you work for (your PI or company.)
>>    2. *The chemical or material. *Please provide all common names,
>>       trade names, and CAS numbers where appropriate. Include an MSDS,
>>       if available; or provide the reason, if not. Make sure to
>>       include information for any new secondary chemicals (such as a
>>       developer for a new resist). Read the MSDSs as well as the
>>       Stanford Chemical Storage Groups
>>       <http://snf.stanford.edu/Materials/StorageGroup.html> and the
>>       Stanford Chemical Safety Data Base
>>       <http://ehs.stanford.edu/servlet/chemsafe.lookup.class> sections
>>       on this website to determine the Storage Group Identifier
>>       <http://snf.stanford.edu/Materials/StorageGroup.html> and Main
>>       Hazard Class
>>       <http://snf.stanford.edu/Materials/HazardClasses.html> of your
>>       chemical/material.
>>    3. *Vendor/manufacturer info:* address and phone number, website URL.
>>    4. *Reason for request:* Please give serious thought to this. If
>>       you have any process information (application notes from the
>>       vendor, protocol from another lab, experimental methods section
>>       of an article), please include it, preferably as attachments.
>>       Ask yourself these questions: Is this the latest procedure? Are
>>       there newer/safer alternatives that will also work for my
>>       project? Will any of the current SNF approved chemicals and
>>       materials work for me?
>>    5. *Process Flow:* Please provide a detailed process flow
>>       description on how and where you proposed to use this chemical.
>>       This should include *all* *Lab equipment
>>       <http://snf.stanford.edu/Equipment/EquipByArea.html> *to be used
>>       for processing your wafers once your new chemical or material
>>       has been used (even if your new material is a film that is
>>       removed, it may still pose potential contamination concerns.)
>>       Make sure to include wet benches. Please note that f the
>>       chemical/material is to be used in any the "clean"
>>       <http://snf.stanford.edu/Materials/EquipmentLists/Clean.html>
>>       equipment, purity specifications will be needed. This is most
>>       important for chemicals/material that are not normally used for
>>       VLSI device fabrication. To be allowed into a "clean" tool
>>       <http://snf.stanford.edu/Materials/EquipmentLists/Clean.html> ,
>>       the material should MOS grade or better.
>>    6. *Amount and form. *How much will you bring in? Is it solid,
>>       powder <http://snf.stanford.edu/Materials/Powders.html> or
>>       liquid? (Note: as a general rule, powders
>>       <http://snf.stanford.edu/Materials/Powders.html> are not
>>       permitted in the cleanroom.) Do you need to mix it to use it?
>>    7. *Storage: *Will you be storing your chemical/material at SNF? If
>>       so, please note any potential reactivities (this should be on
>>       the MSDS). Storage groups
>>       <http://snf.stanford.edu/Materials/StorageGroup.html> A,B,D and
>>       L are stored in the yellow solvent cabinet in the furnace
>>       support area, while storage groups
>>       <http://snf.stanford.edu/Materials/StorageGroup.html> C, E, F
>>       and G are stored on top of one of the Pass-through Carts. Ensure
>>       your chemical container or material is properly labeled
>>       <http://snf.stanford.edu/Materials/ChemLabels.html> . If there
>>       is no available room, it must be stored by in the bulk storage
>>       area. You will then need to obtain it from receiving area
>>       personnel each time you want to use it and return it to them
>>       when you are finished using it (or each time you leave the lab).
>>       Note that there is no storage of chemicals/materials in the
>>       processing lab or at any wet bench.
>>    8. *DIsposal*: How will you dispose of any waste or excess chemical
>>       or material? In your discussions with experts and vendors, try
>>       to determine the best way to dispose of your spent chemicals and
>>       by-products. Please refer to the SNF Labmembers Safety Manual
>>       <http://snf.stanford.edu/Labmembers/Labmembers.html> for the
>>       different methods of waste disposal that are available in the lab.
>>
>> ----------------------------------------------
>>  
>> Please get in touch about next steps.
>>  
>> Thanks,
>> Rick
>> -------------------------------------
>> Rick Clayton
>> VP Advanced Materials
>> InVisage Technologies
>> mail: 101 College St., South Tower, Rm 312, Toronto, Ontario, Canada, 
>> M5G 1L7
>> Office: 416 673 6520
>> mobile: 613 291 6578
>> email: rick.clayton at invisageinc.com 
>> <mailto:rick.clayton at invisageinc.com>
>> This email contains information that is confidential. The information 
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>>  
>
>
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