PDMS in innotec?

David Rogow rogow at chemistry.ucsc.edu
Mon Apr 14 11:15:07 PDT 2008


I was wondering if I need to get permission from SpecMat to use PDMS 
(polydimethylsiloxane) in the innotec ebeam evaporator?  It would be in 
solid form, 4" wafer size, and I would be evaporating metals onto the 
surface of the polymer.  It would not be used with any other equipment 
and will not be stored in the lab.  If there is any more information you 
need, please let me know.  

Thank you,


David L. Rogow
Graduate Student
Oliver Materials Research Group
Department of Chemistry and Biochemistry
University of California Santa Cruz
1156 High St. Santa Cruz, CA 95064
(831) 459-4225 lab (Physical Sciences 253)
(831) 331-5230 cell

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