PDMS in innotec?

Mary Tang mtang at stanford.edu
Mon Apr 14 11:34:46 PDT 2008

Hi David --

Cured PDMS on substrates (namely silicon or glass) is approved for use 
in innotec.  Did you have a solid 4" piece of PDMS in mind?

There are restrictions on where and how to mix and apply PDMS in the lab 
which must be strictly observed, because the silicon oil in the base can 
create havoc in parts of the lab.  If you are applying PDMS in SNF and 
are not familiar with the procedures, let me know and we can review them.



David Rogow wrote:
> Hello,
> I was wondering if I need to get permission from SpecMat to use PDMS 
> (polydimethylsiloxane) in the innotec ebeam evaporator?  It would be 
> in solid form, 4" wafer size, and I would be evaporating metals onto 
> the surface of the polymer.  It would not be used with any other 
> equipment and will not be stored in the lab.  If there is any more 
> information you need, please let me know. 
> Thank you,
> David

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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