[Fwd: Materials & non-clean processing of PZT]

Mahnaz Mansourpour mahnaz at stanford.edu
Fri Apr 18 17:17:11 PDT 2008


  I have not study this yet.
Mary, is the single furnace in wafer saw room up?

mahnaz

-------- Original Message --------
Subject: Materials & non-clean processing of PZT
Date: Mon, 14 Apr 2008 10:33:56 -0700
From: Nathan Salowitz <Salowitz at Stanford.edu>
To: mahnaz at snf.stanford.edu



Hello Mahnaz,
	Just following up on the email below.  Please let me know what steps 
I can take to facilitate getting the materials approved, getting 
training on the spin coater (who should I contact?  I do not see a 
spin coater in the equipment list).  If you would like to meet please 
let me know.  I would like to do this process very soon so I need to 
keep this all moving forward.

	Cheers,
		Nate


Hi Mahnaz,
	I talked to you briefly last week about some equipment I'm looking 
to use which the SNF has.  Specifically a spin coater and 
oven/furnace capable of 700C which can fit a 4 inch wafer.  These do 
not need to be in clean room areas.

The MSDS for the materials I'm working with are attached as is a 
process flow.  There are 2 groups, one labeled Precursor and the 
other labeled Solution (some appear in both).  I will be mixing the 
precursor chemicals in a Chem-E lab to form the Solution that I need 
to do the spin coating with, precursors are primarily included so you 
know what is going into the solution.  The solution I want to use in 
the SNF Facilities should essentially be a particulate (PZT) 
suspended is a fluid, MSDS sheets for a similar particulate and the 
other chemicals in the solution are also included.

Please let me know your thoughts on this and if you have any further 
questions.  Please also let me know who I need to talk to about 
training/permission to use the spin coater and oven/furnace

	Thankyou,	
		Nate

Nathan Salowitz
Coral ID nxs4059

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