[Fwd: Materials & non-clean processing of PZT]

Mary Tang mtang at stanford.edu
Fri Apr 18 17:19:02 PDT 2008

Wups, I haven't looked at this yet...  And yes, the Thermolyne furnace 
is OK to use.  There's a manual in there.  I'll go over its use with 
anyone who needs it.


Mahnaz Mansourpour wrote:
> I have not study this yet.
> Mary, is the single furnace in wafer saw room up?
> mahnaz
> -------- Original Message --------
> Subject: 	Materials & non-clean processing of PZT
> Date: 	Mon, 14 Apr 2008 10:33:56 -0700
> From: 	Nathan Salowitz <Salowitz at Stanford.edu>
> To: 	mahnaz at snf.stanford.edu
> Hello Mahnaz,
> 	Just following up on the email below.  Please let me know what steps 
> I can take to facilitate getting the materials approved, getting 
> training on the spin coater (who should I contact?  I do not see a 
> spin coater in the equipment list).  If you would like to meet please 
> let me know.  I would like to do this process very soon so I need to 
> keep this all moving forward.
> 	Cheers,
> 		Nate
> Hi Mahnaz,
> 	I talked to you briefly last week about some equipment I'm looking 
> to use which the SNF has.  Specifically a spin coater and 
> oven/furnace capable of 700C which can fit a 4 inch wafer.  These do 
> not need to be in clean room areas.
> The MSDS for the materials I'm working with are attached as is a 
> process flow.  There are 2 groups, one labeled Precursor and the 
> other labeled Solution (some appear in both).  I will be mixing the 
> precursor chemicals in a Chem-E lab to form the Solution that I need 
> to do the spin coating with, precursors are primarily included so you 
> know what is going into the solution.  The solution I want to use in 
> the SNF Facilities should essentially be a particulate (PZT) 
> suspended is a fluid, MSDS sheets for a similar particulate and the 
> other chemicals in the solution are also included.
> Please let me know your thoughts on this and if you have any further 
> questions.  Please also let me know who I need to talk to about 
> training/permission to use the spin coater and oven/furnace
> 	Thankyou,	
> 		Nate
> Nathan Salowitz
> Coral ID nxs4059

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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