[Fwd: Materials & non-clean processing of PZT]
mtang at stanford.edu
Fri Apr 18 17:19:02 PDT 2008
Wups, I haven't looked at this yet... And yes, the Thermolyne furnace
is OK to use. There's a manual in there. I'll go over its use with
anyone who needs it.
Mahnaz Mansourpour wrote:
> I have not study this yet.
> Mary, is the single furnace in wafer saw room up?
> -------- Original Message --------
> Subject: Materials & non-clean processing of PZT
> Date: Mon, 14 Apr 2008 10:33:56 -0700
> From: Nathan Salowitz <Salowitz at Stanford.edu>
> To: mahnaz at snf.stanford.edu
> Hello Mahnaz,
> Just following up on the email below. Please let me know what steps
> I can take to facilitate getting the materials approved, getting
> training on the spin coater (who should I contact? I do not see a
> spin coater in the equipment list). If you would like to meet please
> let me know. I would like to do this process very soon so I need to
> keep this all moving forward.
> Hi Mahnaz,
> I talked to you briefly last week about some equipment I'm looking
> to use which the SNF has. Specifically a spin coater and
> oven/furnace capable of 700C which can fit a 4 inch wafer. These do
> not need to be in clean room areas.
> The MSDS for the materials I'm working with are attached as is a
> process flow. There are 2 groups, one labeled Precursor and the
> other labeled Solution (some appear in both). I will be mixing the
> precursor chemicals in a Chem-E lab to form the Solution that I need
> to do the spin coating with, precursors are primarily included so you
> know what is going into the solution. The solution I want to use in
> the SNF Facilities should essentially be a particulate (PZT)
> suspended is a fluid, MSDS sheets for a similar particulate and the
> other chemicals in the solution are also included.
> Please let me know your thoughts on this and if you have any further
> questions. Please also let me know who I need to talk to about
> training/permission to use the spin coater and oven/furnace
> Nathan Salowitz
> Coral ID nxs4059
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
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