Nickel Substrates for Photolithography

Mahnaz Mansourpour mahnaz at stanford.edu
Wed Aug 20 14:42:46 PDT 2008


Hi Kevin,

What is the flatness of your sample?

mahnaz

Kevin Crabb wrote:

> Hello SpecMat members,
>
> I have several 125 micron thick nickel substrates which have been cut 
> to 100mm (4" wafer) size.  These are pure nickel (99.99+%) from 
> Sigma-Aldrich, and I'm hoping to do photolithography on them to serve 
> as an etch mask for later processing with iron(III) chloride.
>
>  
>
> I was wondering if it's possible to do the photolithography on these 
> nickel wafers with the svgcoater, evaligner, and svgdev instruments.  
>
>  
>
> If not, could I cut this nickel into smaller pieces, tape it with 
> kapton tape to a 4" silicon wafer, and then process this 
> silicon/nickel on the above instruments?
>
>  
>
> Finally, if neither of the two above is acceptable, can I use the 
> headway instrument to coat a 4" nickel wafer, and the EValigner to 
> expose the resist?  
>
>  
>
> Thanks in advance,
>
> Kevin
>
> kcrabb at stanford.edu
>

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