PZT solution spec-mat MSDS and other materials

[Nathan Salowitz]

Hello,
    Here are the electronic copies of the paperwork for the chemical I 
discussed with Mary and Ed at the Process Clinic on 8/25/2008, and they 
gave a tentative approval.

It is a PZT Sol-Gel solution I would like to use in the SNF.  I plan to 
use the Headway Spinner with associated hotplates to apply the material 
to my wafers and RTAGaAs to perform higher temperature bakes (by which 
time the material will be a PZT film).

    I can store my chemical off site.

Please let me know if you need any further information, would suggest 
different equipment, or have other concerns.

    Nathan Salowitz
    (Coral ID: NXS4059)
-------------- next part --------------
A non-text attachment was scrubbed...
Name: Document.pdf
Type: application/pdf
Size: 17696 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20080825/79344edf/attachment.pdf>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: MSDS PZT-E Series?ver 2 (2).pdf
Type: application/pdf
Size: 38082 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20080825/79344edf/attachment-0001.pdf>