Au colloids solution and APTES aqueous solution

Mary Tang mtang at
Fri Feb 29 10:43:14 PST 2008

Hi Shu Hu --

I am afraid we have not yet allowed metal nanoparticles in solution into 
the lab, especially for spin-coating.  The reason is that spin coating 
results in a spray of solution which quickly dries, leaving floating 
nanoparticles which can be blown around the station by the exhaust.  
This can contaminate the bench and damage other people's work.  We have 
allowed latex spheres, because they are not conductive and can be 
removed by standard resist clean processes.  So, do not bring in metal 
nanoparticles in solution into the lab.

(Nanoparticles which are adhered to substrates, however, are allowed in 
the fab in certain stations.  Obviously, your use would be restricted to 
gold contaminated equipment.)

We do, however, have a spin coater outside the lab for this very 
purpose.  It is not the best coater, but is functional.  If you have 
taken all-litho and are qualified on one of the manual coaters, I can 
show you the system.  It is not inside the lab and there is no lab fee 
for using it.


Shu Hu wrote:
> Hi all,
> I plan to use 40nm Au colloids solution (Prod# 15707-20, 
> 20mL and APTES 
> surfactants (3-AMINOPROPYLTRIETHOXYSILANE) aqueous solution ~100mL. 
> These are used in the spin coating equipments in the litho area, like 
> Headway or Laurell. The frequency of the usage could be once or twice 
> a week. The Au colloid spin coating is for a following Ge nanowire 
> growth outside SNF.
> Thanks,
> Shu Hu
> Paul. McIntyre group, MSE

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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