FW: Request to use Semiclean RTP
edmyers at stanford.edu
Wed Jan 9 08:48:21 PST 2008
This request poses an interesting question. By definition of
Semiclean (<1E12), her samples meet our requirements. The question
is how comfortable are we knowingly putting in gold and iron in to the tool.
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>Delivered-To: edmyers at stanford.edu
>Delivered-To: emyers at snf.stanford.edu
>Subject: FW: Request to use Semiclean RTP
>Date: Tue, 8 Jan 2008 17:09:07 -0800
>Thread-Topic: Request to use Semiclean RTP
>From: "Alice Fischer-Colbrie" <AFischer-Colbrie at nanosysinc.com>
>To: <emyers at snf.stanford.edu>
>Cc: "Mary Tang" <mtang at stanford.edu>
>X-Archived: msg.ahMoWG at mx2.nanosysinc.com
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>I understand you lead the 'SpecMat' committee and could best address
>my question to Mary below. (Unfortunately, she was out of town when
>I sent in this request late in November.)
>We would like to use/test the semi-clean RTP (with N2O capability)
>with a sample that is not entirely CMOS-grade clean. (See attached data.)
>Could you please let us know if this sample might meet spec? If you
>know what the contamination spec limit is, that would also be
>helpful. As appropriate, could you please bring this to be reviewed
>with the SpecMat Committee?
>Finally, could you please let me know as soon as possible, what the
>timing for a decision might be?
>From: Alice Fischer-Colbrie
>Sent: Friday, November 30, 2007 11:57 AM
>To: 'mtang at stanford.edu'
>Subject: Request to use Semiclean RTP
>As we discussed, Nanosys is interested in running Si nanowire wafers
>through an oxidation with nitiridation. At this time, it looks like
>the 'contaminated' RTP tool does not have N2O capability but the
>semi-clean tool does. Therefore we would like use this tool, at
>least for testing purposes, if possible.
>Attached are TXRF results (Nanosys Proprietatry and Confidential) of
>our Si nanowires per your request. Our NWs use Au catalyst that we
>subsequently etch off. For the TXRF measurement, the Si nanowires
>are removed from the substrate and put onto a carrier
>substrate. (However, for the process, we do not plan to remove the
>NWs from the substrate.)
>Could you please forward our request as appropriate?
>Alice Fischer-Colbrie, Ph.D.
>2625 Hanover St.
>Palo Alto, CA 94304
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