Aluminum Nitride

Joey Doll jcdoll at stanford.edu
Sat Jan 19 10:47:51 PST 2008


Hi -
I'm considering a process which would use aluminum nitride as a
piezoelectric actuator layer. I wasn't able to find anything mentioned
about it on the SNF website and was wondering if there is a recipe /
it would be possible to sputter it on grypon or metallica? It is
sputtered up at Berkeley
(http://microlab.berkeley.edu/labmanual/chap6/6.08.html) and I was
hoping to use it instead of other materials like ZnO or PZT in order
to keep my wafer semi-clean. Please let me know what you think.

Thanks!
Joey



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