Request for New Chemical Approval- PI-5878G and VM-651

Cathy Chiang cfchiang at
Wed Jul 2 01:12:22 PDT 2008


Thank you very much. I will do the develop/etch in headway. Don't worry!


Quoting Mary Tang <mtang at>:

> Hi Cathy --
> Your VM-651 has been previously approved.  It should have a yellow
> label for storing in the lab in the flammables cabinet (personal
> chemicals area.)  Be aware that this is an organosilane much like HMDS
> -- it is low molecular weight/high vapor pressure and is very for you
> or anyone else to inhale.
> The polyimide should be OK, but be aware that the tri-methyl benzene,
> which is a likely carcinogen.  Be cautious in handling and using.
> Please get a yellow label to store.
> As for the process, what you've outline is fine -- I especially
> appreciate your developing the resist/etching the PI in a beaker (and
> not the svgdev -- THANKS!)
> So, your chemicals are approved.  Please obtain yellow labels and
> register your chemicals with Mahnaz when they arrive.
> Thanks,
> Mary

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