[Fwd: boron spin-on dopant]

Mahnaz Mansourpour mahnaz at stanford.edu
Thu Jul 24 17:46:12 PDT 2008

-------- Original Message --------
Subject: boron spin-on dopant
Date: Thu, 24 Jul 2008 13:58:00 -0700
From: "Mohamed Hilali" <mohamed at twincreekstechnologies.com>
To: mahnaz at snf.stanford.edu

Hi Mahnaz,

I would like to use a boron spin-on dopant source. It is very similar to 
the phosphorus spin-on dopant source  that we currently use except that 
this is a p-type dopant source instead of n-type.

I have attached an MSDS. Once this material has been accepted the plan 
is to spin-on a Si wafer using the Headway spin coater and then to bake 
the wafer on a hot plate at 100-200 C.

Please let me know if you have any questions or concerns.

Thank you very much.

Mohamed Hilali

Twin Creeks Technologies,

Tel: 408-507-1649
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