3-Aminopropyltriethoxysilane (APTES)

Zihong (Bill) Liu liuzh at stanford.edu
Mon Jun 2 10:31:50 PDT 2008



I am considering bringing a wafer covered with APTES monolayer into SNF for
photolithography and Mary said this should be fine. For the formal approval,
here is the details:

1. My contact information:

Zihong (Bill) Liu

Coral login: billliu

Phone: 650-862-5521

Email:  <mailto:liuzh at stanford.edu> liuzh at stanford.edu

PI: Prof. Yoshio Nishi and Prof. Zhenan Bao


2. The chemical or material: 3-Aminopropyltriethoxysilane (APTES)

CAS number: 919-30-2

MSDS attached.


3. Vendor/manufacturer info: 

Gelest, Inc., 11 East Steel Road, Morrisville, PA 19067
TEL: (215)547-1015 * FAX (215)547-2484


4. Process Flow:



5. Form: it is a monolayer on a silicon oxide wafer. No storage needed.


Thank you very much!



Zihong (Bill) Liu


Ph.D. Candidate, 

Department of Electrical Engineering,

Center for Integrated Systems, CIS-018,

420 Via Palou, Stanford University,

Stanford, CA 94305


Office: CIS-018 & Stauffer III-09, Stanford University;

Phone: 650-725-4185 (CIS-018); 650-725-5403 (Stauffer III-09);

Mobile: 650-862-5521

Email: liuzh at stanford.edu



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