Fwd: protocol question
aditya at twincreekstechnologies.com
Mon Jun 2 15:38:23 PDT 2008
Hello, could you please advise on my question below, originally to Maurice.
---------- Forwarded message ----------
From: <maurice at stanford.edu>
Date: Mon, Jun 2, 2008 at 3:35 PM
Subject: Re: protocol question
To: Aditya Agarwal <aditya at twincreekstechnologies.com>
I am not sure. I am going to refer you to specmat for that question.
specmat at snf.stanford.edu
Quoting Aditya Agarwal <aditya at twincreekstechnologies.com>:
> I have some Si wafers that have had a TiN deposited at UHV--the wafers are
> CMOS clean. I would like to put some Al on top of the TiN. What cleaning
> and which bench do you recommend ?
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