Fwd: protocol question

Aditya Agarwal aditya at twincreekstechnologies.com
Mon Jun 2 15:38:23 PDT 2008

Hello, could you please advise on my question below, originally to Maurice.

---------- Forwarded message ----------
From: <maurice at stanford.edu>
Date: Mon, Jun 2, 2008 at 3:35 PM
Subject: Re: protocol question
To: Aditya Agarwal <aditya at twincreekstechnologies.com>

I am not sure.  I am going to refer you to specmat for that question.

specmat at snf.stanford.edu


Quoting Aditya Agarwal <aditya at twincreekstechnologies.com>:

 Hi Maurice,
> I have some Si wafers that have had a TiN deposited at UHV--the wafers are
> CMOS clean. I would like to put some Al on top of the TiN.  What cleaning
> and which bench do you recommend ?
> thanks.
> a.
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