Lithography developer

Cathy Chiang cfchiang at stanford.edu
Tue Jun 10 01:13:04 PDT 2008


Hi SNF SpecMat,

My name is Cathy whose Coral ID is cfchiang. In my fabrication process  
I have to use lithography to pattern and etch aluminum nitride.  
However, since aluminum nitride is very likely to be etched using  
general developer, some special developer should be used instead. I am  
writing to ask if there is any suggested developer(s) that has been  
approved by SNF?

Thank you sincerely,
Cathy



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