cfchiang at stanford.edu
Tue Jun 10 01:13:04 PDT 2008
Hi SNF SpecMat,
My name is Cathy whose Coral ID is cfchiang. In my fabrication process
I have to use lithography to pattern and etch aluminum nitride.
However, since aluminum nitride is very likely to be etched using
general developer, some special developer should be used instead. I am
writing to ask if there is any suggested developer(s) that has been
approved by SNF?
Thank you sincerely,
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