SOG material

Mary Tang mtang at
Mon Jun 16 13:03:58 PDT 2008

Hi --

Could we get an electronic version of the MSDS for our files?  You may 
have sent before, but I can't seem to find one for this particular 
formulation.  Who makes it?



Mahnaz Mansourpour wrote:
> Thank you for the process flow, this email is  to inform you that your 
> chemical has been approved. Please come by and get the appropriate 
> labels from me and when ready we can get the chemical from the 
> refrigerator in the back.
> mahnaz
> Mohamed Hilali wrote:
>> Hi Mahnaz,
>> Below is the process of how we intend to use the FG65 SOG:
>> - Spin-on the SOG on a wafer in the Headway spinner
>> - Bake on the hot plate at 150-200 degrees C
>> - Make manual adhesion or bonding (by hand) to another wafer
>> - Bake in the BlueM oven at 400 degrees C
>> Jim Kruger will be running the spin-on coating of the SOG.
>> Kind regards,
>> Mohamed Hilali
>> Tel: 408-507-1649
>> Twin Creeks Technologies, Inc

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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