Qualification for Germanium bench cleans

Mary Tang mtang at stanford.edu
Tue Mar 11 14:17:54 PDT 2008

Hi all --

The germanium group wants to qualify wbgen2 for their cleans.  What kind 
of qual should they do?  TXRF is standard.  So, what kind of TXRF 
testing should be done?  And what kind of levels are considered "wbdiff 
clean"?  Should CV's be done?

I ask, because what is done here is very likely going to be what will be 
recommended for the spin-etch station.


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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