Fwd: Re: [Fwd: InSb]

Ed Myers edmyers at stanford.edu
Mon Mar 31 15:49:27 PDT 2008


All,

Looking over the MSDS and process flow, this seems OK.  Does anyone 
have experience with InSb which would warrant concern?

Ed


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>Date: Mon, 31 Mar 2008 15:02:03 -0700
>From: "Erzsi Szilagyi" <eszilagy at stanford.edu>
>Sender: erzsiszilagyi at gmail.com
>To: "Ed Myers" <edmyers at stanford.edu>
>Subject: Re: [Fwd: InSb]
>Cc: acremann at slac.stanford.edu
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>Hi,
>
>Our process would be a fairly simple one with the temperature never 
>exceeding that of the YES oven:
>
>1. Standard optical lithography using the YES oven, headway, 
>Karlsuss, and manual development.
>2. Optional:  Oxygen cleaning in Drytek1or argon ion sputtering.
>3. Optional:  Etch in HCl to remove the oxides at either Wetbench 
>General or Wetbench GaAs.
>2. Deposit the metal layers using Metallica. (There is a possibility 
>to do it outside of the SNF.)
>3. Standard liftoff.
>4. Cleave.
>
>I look forward to hearing from you soon on our use of InSb in the 
>SNF. Please let me know if there is other information that I can provide.
>
>Thanks,
>Erzsi
>
>
>
>
>
>On Mon, Mar 31, 2008 at 9:45 AM, Ed Myers 
><<mailto:edmyers at stanford.edu>edmyers at stanford.edu> wrote:
>Erzsi,
>
>In order to answer your question, we need a lot more
>information.  Yes, InSb has been ran in our fab.  The real question
>is what equipment and temperatures you need for your
>processing.  Along these lines, we would like to see your proposed
>process flow.  Once we have this information, we can evaluate what
>type of risks our lab members and equipment will be exposed.
>
>Regards,
>Ed
>
>
>
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> >Date: Fri, 28 Mar 2008 16:17:02 -0700
> >From: Mahnaz Mansourpour <<mailto:mahnaz at stanford.edu>mahnaz at stanford.edu>
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> >To: "<mailto:SpecMat at snf.stanford.edu>SpecMat at snf.stanford.edu" 
> <<mailto:SpecMat at snf.stanford.edu>SpecMat at snf.stanford.edu>
> >Subject: [Fwd: InSb]
> >
> >
> >
> >-------- Original Message --------
> >Subject: InSb
> >Date: Fri, 28 Mar 2008 10:29:13 -0700
> >From: Erzsi Marie Szilagyi
> ><mailto:eszilagy at stanford.edu><<mailto:eszilagy at stanford.edu>eszila 
> gy at stanford.edu>
> >To: 
> <mailto:mahnaz at snf.stanford.edu><mailto:mahnaz at snf.stanford.edu>mahnaz at snf.stanford.edu
> >
> >
> >
> >Hi Mahnaz,
> >
> >I'm interested in using InSb
> >(<<http://asp.cerac.com/CatalogNet/default.aspx?p=msdsFile&msds=m00 
> 0860.htm>http://asp.cerac.com/CatalogNet/default.aspx?p=msdsFile&msds=m000860.htm>http://asp.cerac.com/CatalogNet/default.aspx?p=msdsFile&msds=m000860.htm)
> >as
> >my wafer material and was wondering if you could tell me what I need
> >to do to be able to use it in the SNF? I'm working with Yves Acremann
> >and he recommended that I email you.
> >
> >Thanks so much!
> >Erzsi
> >
> >
>
>





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