[Fwd: Fwd: Contamination results from SNF]

Mary Tang mtang at stanford.edu
Mon May 5 08:33:42 PDT 2008

Hi again --

Aditya came by to talk last Friday and may have talked with some of 
you.  As I understand it, his devices contain TiSi (Ti from gryphon).  
The wafers go through EVBond and so are considered gold.  The problem is 
that he is concerned about contamination from the rtagaas.  He had 
looked at the rtaag, but it does not offer the control he requires.  He 
has proposed that his company install an RTA from AllWin (at $60K, or 
so) with the understanding that it be used by his company exclusively 
and then donated to SNF when they are done.

Alternatively, he'd like to use the AG4108, if his wafers can be 
considered semiclean.  They would be considered semiclean, if it were 
not for the EVBond step.  We should talk with him about what his 
experimental plans are because eventually, he will be migrating over to 
some really odd materials.

I think Aditya is planning to come to today's SpecMat clinic at 3 pm to 
discuss his processing needs. 


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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