CVD of organosilicate glass films at SNF
athiel at stanford.edu
Thu May 8 15:34:40 PDT 2008
I am a materials science graduate student interested in depositing
thin films of organosilicate glass films by means of CVD. However,
this goal is merely in the planning stages, so I am simply trying to
extract all the fundamental information I need to get started. I have
never performed CVD, so bear with me.
If you could provide me with all the essential information about
setting up a new CVD process, that would be of great help to me. I'll
be supplying my own gases (the exact precursors are not yet known), so
are there gas tank restrictions/suggestions? Are any special tools or
fixtures needed? Are you currently set up to deposit
carbon-containing films? Are there special considerations for
carbon-containing films? What else do I need to know?
Once I know more details, I will certainly fill you in. I appreciate
you taking the time to walk me through this process.
More information about the specmat