[Fwd: Parylene]

Mahnaz Mansourpour mahnaz at stanford.edu
Thu May 8 17:04:35 PDT 2008


Hello all,

I already have talked to him , I need to look at the msds and decide on 
the yes oven part of it, the rest of litho is ok.  What do every one 
think of the etching part of it?
mahnaz
-------- Original Message --------
Subject: Parylene
Date: Thu, 8 May 2008 16:01:26 -0700
From: "Vikram Mukundan" <mvikram at stanford.edu>
Organization: Stanford University
To: "Mahnaz Mansourpour" <mahnaz at snf.stanford.edu>



Hi Mahnaz,
 
I had talked to you this afternoon about allowing parylene coated wafers 
in the litho and possibly in the plasma. I have attached some files 
related to this for your reference.
 
1. My process run with highlighted steps after parylene-N deposition.
2. MSDS for parylene-N.
3. A paper on the thermal stability of parylene-N (they are stable up to 
350 C)
4. A paper on plasma etching techniques on parylene coatings using O2 
plasma, RIE and Bosch process. This paper involves lithography with HMDS 
prime, spin resist, baking and developing. In a private communication, 
the author of this paper has mentioned that parylene is inert in most 
processes.
 
My minimum requirement would be to be able to perform litho steps on 
coated wafers. If things work out well I would like to see if I can use 
one of the plasma etchers. My process is gold contaminated at this stage.
 
Please let me know if you need any more information.
 
thank you for the help,
Vikram
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20080508/bfa0f38e/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: ActuatorRunsheet4.xls
Type: application/vnd.ms-excel
Size: 15360 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20080508/bfa0f38e/attachment.xls>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: Parylene_MSDS.pdf
Type: application/pdf
Size: 74581 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20080508/bfa0f38e/attachment.pdf>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: Parylen_Stability.pdf
Type: application/pdf
Size: 101654 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20080508/bfa0f38e/attachment-0001.pdf>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: Meng_Tai_ParyleneCEtch.pdf
Type: application/pdf
Size: 1483219 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20080508/bfa0f38e/attachment-0002.pdf>


More information about the specmat mailing list