mtang at stanford.edu
Thu May 8 17:32:33 PDT 2008
Hi all --
My two cents'... Since the parylene is already polymerized/deposited,
it's pretty inert. It is a cyclic, fairly inert polymer, maybe kind of
like cyclotene/BCB, so I think the etching chemistry might be similar --
so fluorine-based chemistry with oxygen, I suspect, would be a good
place to start. This places the etching in drytek4 or pquest. It would
be helpful to know what his etch needs are (how deep, what for, what
resist/mask, what size structures.) That would help determine whether
the drytek4 or pquest can meet his process needs.
Who will be getting back to him?
Mahnaz Mansourpour wrote:
> Hello all,
> I already have talked to him , I need to look at the msds and decide
> on the yes oven part of it, the rest of litho is ok. What do every
> one think of the etching part of it?
> -------- Original Message --------
> Subject: Parylene
> Date: Thu, 8 May 2008 16:01:26 -0700
> From: "Vikram Mukundan" <mvikram at stanford.edu>
> Organization: Stanford University
> To: "Mahnaz Mansourpour" <mahnaz at snf.stanford.edu>
> Hi Mahnaz,
> I had talked to you this afternoon about allowing parylene coated
> wafers in the litho and possibly in the plasma. I have attached some
> files related to this for your reference.
> 1. My process run with highlighted steps after parylene-N deposition.
> 2. MSDS for parylene-N.
> 3. A paper on the thermal stability of parylene-N (they are stable up
> to 350 C)
> 4. A paper on plasma etching techniques on parylene coatings using O2
> plasma, RIE and Bosch process. This paper involves lithography with
> HMDS prime, spin resist, baking and developing. In a private
> communication, the author of this paper has mentioned that parylene is
> inert in most processes.
> My minimum requirement would be to be able to perform litho steps on
> coated wafers. If things work out well I would like to see if I can
> use one of the plasma etchers. My process is gold contaminated at this
> Please let me know if you need any more information.
> thank you for the help,
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
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