[Fwd: Parylene]

Mary Tang mtang at stanford.edu
Thu May 8 17:32:33 PDT 2008

Hi all --

My two cents'...  Since the parylene is already polymerized/deposited, 
it's pretty inert.  It is a cyclic, fairly inert polymer, maybe kind of 
like cyclotene/BCB, so I think the etching chemistry might be similar -- 
so fluorine-based chemistry with oxygen, I suspect, would be a good 
place to start.  This places the etching in drytek4 or pquest.  It would 
be helpful to know what his etch needs are (how deep, what for, what 
resist/mask, what size structures.)  That would help determine whether 
the drytek4 or pquest can meet his process needs.

Who will be getting back to him?


Mahnaz Mansourpour wrote:
> Hello all,
> I already have talked to him , I need to look at the msds and decide 
> on the yes oven part of it, the rest of litho is ok.  What do every 
> one think of the etching part of it?
> mahnaz
> -------- Original Message --------
> Subject: 	Parylene
> Date: 	Thu, 8 May 2008 16:01:26 -0700
> From: 	"Vikram Mukundan" <mvikram at stanford.edu>
> Organization: 	Stanford University
> To: 	"Mahnaz Mansourpour" <mahnaz at snf.stanford.edu>
> Hi Mahnaz,
> I had talked to you this afternoon about allowing parylene coated 
> wafers in the litho and possibly in the plasma. I have attached some 
> files related to this for your reference.
> 1. My process run with highlighted steps after parylene-N deposition.
> 2. MSDS for parylene-N.
> 3. A paper on the thermal stability of parylene-N (they are stable up 
> to 350 C)
> 4. A paper on plasma etching techniques on parylene coatings using O2 
> plasma, RIE and Bosch process. This paper involves lithography with 
> HMDS prime, spin resist, baking and developing. In a private 
> communication, the author of this paper has mentioned that parylene is 
> inert in most processes.
> My minimum requirement would be to be able to perform litho steps on 
> coated wafers. If things work out well I would like to see if I can 
> use one of the plasma etchers. My process is gold contaminated at this 
> stage.
> Please let me know if you need any more information.
> thank you for the help,
> Vikram

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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