[Fwd: FW: Thick resist eval for SVTC]

[Mahnaz Mansourpour]

Hello all,

Here is the MSDS for TOK resist, request from ASML.
Regardless to say that will be spun up in KScoater.
I do not have any issues with it, let me know if any?
mahnaz
-------- Original Message --------
Subject: FW: Thick resist eval for SVTC
Date: Wed, 14 May 2008 15:55:49 -0400
From: "Binder Mann" <binder.mann at asml.com>
To: "Mahnaz Mansourpour" <mahnaz at stanford.edu>
CC: "Nandasiri Samarakone" <nandasiri.samarakone at asml.com>, "Paul Yick" 
<paul.yick at asml.com>



Hi Mahnaz,
The MSDS is attached for TOK resist we will be evaluating after your 
review. Can you please let us know if approved by the Spec Mat 
committee, we can bring the material in and start developing the coating 
process. Please let me know if you need any additional information.
Thanks and regards, Binder

------------------------------------------------------------------------
From: Alfred Renaldo [mailto:alfred.renaldo at svtc.com]
Sent: Monday, May 12, 2008 10:48
To: Binder Mann
Subject: RE: Thick resist eval for SVTC

Binder, See attached file.  Am trying to get the material for your 
evaluation this week.
 
Al

------------------------------------------------------------------------
From: Binder Mann [mailto:binder.mann at asml.com]
Sent: Monday, May 12, 2008 10:47 AM
To: Alfred Renaldo
Subject: RE: Thick resist eval for SVTC

Hi Alfred,
Can we please get MSDS for TOK material, we will be coating the wafers 
at Stanford Nano lab. We will have to make a proper, complete, 
application to the Spec Mat committee at Stanford prior taking the 
material in the lab. Also can you please give us some time line when we 
will get the material so we can schedule the tool time for imaging.
Thanks and regards, Binder

------------------------------------------------------------------------
From: Alfred Renaldo [mailto:alfred.renaldo at svtc.com]
Sent: Monday, May 05, 2008 13:27
To: Nandasiri Samarakone; Mary Zawadzki
Cc: Danny Wallis; Arnout Smit; Binder Mann; Paul Yick; Linda Ohara
Subject: RE: Thick resist eval for SVTC

Nanda,  I have a better chance of obtaining an SU-8 equivalent to KMPR 
from TOK meeting a 50 um thickness requirement.  Do you wish me to 
investigate this option?  I can most likely get the bottle for free from 
TOK. Mary needs to close on item #2.
 
Al

------------------------------------------------------------------------
From: Nandasiri Samarakone [mailto:nandasiri.samarakone at asml.com]
Sent: Monday, May 05, 2008 10:42 AM
To: Alfred Renaldo; Mary Zawadzki
Cc: Danny Wallis; Arnout Smit; Binder Mann; Paul Yick; Linda Ohara
Subject: Thick resist eval for SVTC

Hi Mary,
 
I am trying to schedule our activities / priorities at Stanford.
 
a) I urgently need to know if SVTC can purchase 500 ml of KMPR ( 50 um 
thick negative photoresist ) approx $600 so that we may continue with 
this evaluation.
b) Can someone communicate to My Thang that ASML needs acess to the HV 
SEM at SVTC so that the AZ 125NXT and 15NXT samples (allready exposed) 
can be examined.
 
Thanks
 
Nanda
 
 

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