[Fwd: Re: Etch alpha-hydroxy, omega-carboxy terminated polystyrene with STS etchers.]
mtang at stanford.edu
Wed Nov 5 12:51:52 PST 2008
Hi all --
Here's Ying's reference, describing use of an STS to transfer the block
copolymer template into an organic transfer layer...
-------- Original Message --------
Subject: Re: Etch alpha-hydroxy, omega-carboxy terminated polystyrene
with STS etchers.
Date: Wed, 5 Nov 2008 11:53:40 -0800
From: Ying Chen <mihuhou at stanford.edu>
To: Mary Tang <mtang at stanford.edu>
References: <016901c9357a$a216b850$4d6318ac at stanford.edu>
<4910D053.8050504 at stanford.edu>
<005601c93ede$975d8480$4d6318ac at stanford.edu>
<4911BF47.6040507 at stanford.edu>
I am sorry! Here it is.
----- Original Message -----
From: "Mary Tang" <mtang at stanford.edu>
To: "Ying Chen" <mihuhou at stanford.edu>
Sent: Wednesday, November 05, 2008 7:44 AM
Subject: Re: Etch alpha-hydroxy, omega-carboxy terminated polystyrene with
> Hi Ying --
> Did you attach a paper? I did not see one...
> Ying Chen wrote:
>> Hi, Mary,
>> Here is the paper I mentioned. The STS tool was described in the
>> experimental session. What is the difference between our tool and theirs?
>> Thank you for refering me to LiWen! I will ask her about this.
>> ----- Original Message ----- From: "Mary Tang" <mtang at stanford.edu>
>> To: "Ying Chen" <mihuhou at stanford.edu>
>> Sent: Tuesday, November 04, 2008 2:44 PM
>> Subject: Re: Etch alpha-hydroxy, omega-carboxy terminated polystyrene
>> with STS etchers.
>>> Hi Ying --
>>> Have you spoken with LiWen Chang (coral ID: lwchang) about her block
>>> copolymer etch process? She uses the pquest.
>>> Ying Chen wrote:
>>>> Dear Sir or Madam,
>>>> I would like to submit a request to do oxygen plasma etching of
>>>> polystyrene in one of our STS tools.
>>>> *My contact information:*
>>>> Name: Ying Chen
>>>> Coral login: mihuhou
>>>> Phone number: (650) 725-0417 (office), (650) 213-6979 (cell)
>>>> Email address: mihuhou at stanford.edu <mailto:mihuhou at stanford.edu>
>>>> My PI: Yoshio Nishi
>>>> *The chemical or material: *
>>>> Common name: alpha-hydroxy, omega-carboxy terminated polystyrene
>>>> Tradename: N/A
>>>> CAS numbers: N/A
>>>> MSDS: Please see the attachment.
>>>> Storage Group Identifier: G (No special precautions indicated. Store
>>>> at room temperature. )
>>>> Main Hazard Class: Health 0; Flammability: 1; Reactivity: 0
>>>> Vendor/manufacturer info:
>>>> Manufacturer name: Polymer Source Inc.
>>>> Address: 124 Avro Street, Dorval (Montreal), QC, H9P 2X8, Canada
>>>> For information, call: 1-866-422-9842, 514-421-5517
>>>> Emergency Number: 1-514-708-4114
>>>> Email: contact at polymersource.com <mailto:contact at polymersource.com>
>>>> Reason for request:
>>>> I want to make a porous PMGI template with vertical pores of aspect
>>>> ratio of >10. The polystyrene I am requesting here serves as the
>>>> sacrificial material in the etching mask.
>>>> Process Flow: (Note: Requests for organo silicon, PMGI and ITO
>>>> envolved in this process will be each filed separately.)
>>>> (1) Outside of SNF: The substrate is a platinum, Ti, or indium doped
>>>> tin oxide (ITO) coated Si wafer or glass sheet; (2) Outside of SNF:
>>>> The PMGI is spin coated and cured onto the substrate; The block
>>>> copolymer, containing organo-silicon and polystyrene, is spin coated
>>>> and cured on top of the PMGI; (3) In SNF: Oxygen plasma etching is
>>>> used to etch the polystyrene domains and the PMGI below these
>>>> polystyrene domains;
>>>> Amount and form:
>>>> Spherical polystyrene domain of 20nm diameter in a ~20nm thick
>>>> di-block copolymer layer.
>>>> I won't store the PMGI coated samples in SNF.
>>>> Non hazardous.
>>>> Please Let me know if you need any more information!
>>>> Thank you!
>>>> Ying Chen
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