FW: new chemical request: WaferBOND spin-on polymer

Mary Tang mtang at stanford.edu
Mon Nov 24 13:34:37 PST 2008


Oops.  We must have neglected to get back to him.  As far as I can tell, 
this should be fine, other than the part about lampoly (drytek4 would be 
more appropriate coming out of KOH etching sans decontamination.)   OK 
with you all?

M

Ross Audet wrote:
>
> Dear Mary,
>
>  
>
> I submitted a request to Specmat about a month ago for an adhesive 
> wafer bonding compound, but haven't received a reply yet.  Is there 
> anything you can do to help speed the review process?
>
>  
>
> Perhaps you could take a look at the attached document and let me know 
> if there are any concerns on your end about use of the chemical.
>
>  
>
> Thanks,
>
> Ross Audet
>
>  
>
> *From:* Ross Audet [mailto:audet at stanford.edu]
> *Sent:* Sunday, October 19, 2008 4:34 PM
> *To:* 'specmat at snf.stanford.edu'
> *Subject:* new chemical request: Waferbond spin on polymer
>
>  
>
>  
>
> Dear Specmat committee,
>
>  
>
> Please see the attached document requesting permission to use of 
> Brewer Waferbond in the SNF cleanroom.  Contact me with any questions.
>
>  
>
> Regards,
>
> Ross Audet
>


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




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