From patricia.carlson at global-fab.com Wed Oct 1 23:23:54 2008 From: patricia.carlson at global-fab.com (Patricia Carlson) Date: Thu, 2 Oct 2008 02:23:54 -0400 (EDT) Subject: Manufacturing Equipment Auction Extension Message-ID: <1102264373312.1101401002153.9044.6.44022046@scheduler> G-Fab LOGO [http://rs6.net/tn.jsp?e=001OnwmlQkf9XiKPTfyErXKzv_5AMyYFwKgmTAo9ZupWWEbLdHBGlDaDxIeYVh-HsAeGdn3BdnOMYN39GVt9So2AnSXQwPzSs-2QcmKwdmLfutK1rbq941z6A==] ~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ Global Fab Surplus LLC (G-Fab) has extended the auction of our remaining inventory an additional three (3) weeks. The auction in September was a success and several customer have purchased equipment at very good pricing. We are auctioning off all our remaining equipment to the highest bidder. The inventory is located in our Colorado Springs warehouse unless otherwise stated. Included in the inventory are thousands of back end semiconductor spare parts and Semiconductor process, facility and test systems. Below is a full list. All Spec sheets are available on request. Click here for specs and pictures [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w]. Bidding has been extended and will end on October 24, 2008 at close of business Pacific time. BID NOW..... TIME IS RUNNING OUT SOON. Inspections can be arranged at any time. Some tools have already been crated and barrier bagged for international shipping, the buyer is responsible for all un-crating and re-crating costs associated with the inspection. If you are interested in a "buy it now" price on anything just send us an email. The tools WILL sell to the highest bidder or the first Buy it Now offer on each tool. Equipment list Item # Description Minimum Bid 01219 IPEC 372m CMP (Very Clean) $15,000 01220 IPEC 372m CMP (Very Clean) $15,000 01221 [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] IPEC 372m CMP [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] (Very Clean) [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] SOLD [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] 01222 [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] IPEC 372m CMP [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] (Very Clean) [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] SOLD [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] 01223 [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] IPEC 676 CMP [http://rs6.net/tn.jsp?e=001OnwmlQkf9XixOBBy_ewrFhMD4iHEeP43a8-zLrtVhTfcfHoW_WBlIKdQ2gMr-eprZ4F3UCHvLm4sRdL8T53V2u1fLknWRvvSDIK6KfF8vO3ZhPBHcjZVKGheRUt8J5DGoU3-MmiTxV3AUQlfyd05POYi5UvyqqvZBKYQE6bx5SE=] (Very clean) [http://rs6.net/tn.jsp?e=001OnwmlQkf9XixOBBy_ewrFhMD4iHEeP43a8-zLrtVhTfcfHoW_WBlIKdQ2gMr-eprZ4F3UCHvLm4sRdL8T53V2u1fLknWRvvSDIK6KfF8vO3ZhPBHcjZVKGheRUt8J5DGoU3-MmiTxV3AUQlfyd05POYi5UvyqqvZBKYQE6bx5SE=] SOLD 01224 [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] LAM Alliance A4 etcher [http://rs6.net/tn.jsp?e=001OnwmlQkf9XgebslP0EPck9JLpJ6ByQ4sbngU4YjAuKjVYP8OlAA8EXELd2ADvWS37Kp97QJLBc103qGCaP9zmI5ex5gDK9PXHsL_pP-axEyRWLfwFGBxtnLq7JV85OOgN0ULExr9xOBZHy-c4XJZpnkw9zA4kLZ9cpjsvlKo6O-DyMGABlNnjaNRyRgzSr3sQZ0a_hZuNUs=] SOLD (4520XL (oxide etch) chamber, TCP9400SE (polyetch), RF Gen Rack, Pump Stack, [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] Gas Cabinets, Electrical Cabinet and accessories (computers,etc.) [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] 01225 [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] LAM Rainbow 4428 (In like new condition) [http://rs6.net/tn.jsp?e=001OnwmlQkf9XiL-MJ91S7YXS4D1KS35I3lLvBKE4ExGC_lwmVB9197rxWRNvox_JhxHK6NuzPVxNzOWMO5i04Es3J3agaiu286L0PUjYy_jopMoQ09JIFG0X8Uj9wqk28_pCpxsdFORuLcyhrpwxDfkDqupsgLGR2WAWclPtxp13olQh_Z4w6d0Q==] $30,000 01226 [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] Biorad/Accent Q7 Overlay system [http://rs6.net/tn.jsp?e=001OnwmlQkf9XiqzJ5KqbJ-DabcihYqiAOZ2y_JQUPjt36ZwyPuzzo6wUZSQjCR2Wk40rmlNxNXQFFVLwzoCgYxAyvExsc96WrT7pfuw8Uawn6v2oVS9Y6CyQy_a7WJ7jVCJrwUUIHkTPmKGZcB_y7F1v1G9aM1Zk96xk9mG6LlADBXttxONcm_6A==] (Very Clean) [http://rs6.net/tn.jsp?e=001OnwmlQkf9XiqzJ5KqbJ-DabcihYqiAOZ2y_JQUPjt36ZwyPuzzo6wUZSQjCR2Wk40rmlNxNXQFFVLwzoCgYxAyvExsc96WrT7pfuw8Uawn6v2oVS9Y6CyQy_a7WJ7jVCJrwUUIHkTPmKGZcB_y7F1v1G9aM1Zk96xk9mG6LlADBXttxONcm_6A==] $30,000 01227 [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] SVG 90s I-Line Tracks [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xjig4IJ8MBP_jIiTRt4RHXPrDVV16Vmw9dCrOl6lYGZ7HIb2GH8wqG4qFg-Aq4rSu3AzFjgqaHFdp0jXLpqJVQXwR_WlB8DHdUHZtn2jHxQl16L5zDcPMAmP0zaq_OvEiPfa07F4UlAaXU0Ri34xNzaZ9CRPsiV8_88ZjDjkgB53w==] (Very Clean) [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xjig4IJ8MBP_jIiTRt4RHXPrDVV16Vmw9dCrOl6lYGZ7HIb2GH8wqG4qFg-Aq4rSu3AzFjgqaHFdp0jXLpqJVQXwR_WlB8DHdUHZtn2jHxQl16L5zDcPMAmP0zaq_OvEiPfa07F4UlAaXU0Ri34xNzaZ9CRPsiV8_88ZjDjkgB53w==] $10,000 01228 [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] SVG 90s I-Line Tracks [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xjig4IJ8MBP_jIiTRt4RHXPrDVV16Vmw9dCrOl6lYGZ7HIb2GH8wqG4qFg-Aq4rSu3AzFjgqaHFdp0jXLpqJVQXwR_WlB8DHdUHZtn2jHxQl16L5zDcPMAmP0zaq_OvEiPfa07F4UlAaXU0Ri34xNzaZ9CRPsiV8_88ZjDjkgB53w==] (Very Clean) [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xjig4IJ8MBP_jIiTRt4RHXPrDVV16Vmw9dCrOl6lYGZ7HIb2GH8wqG4qFg-Aq4rSu3AzFjgqaHFdp0jXLpqJVQXwR_WlB8DHdUHZtn2jHxQl16L5zDcPMAmP0zaq_OvEiPfa07F4UlAaXU0Ri34xNzaZ9CRPsiV8_88ZjDjkgB53w==] $10,000 01229 [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] Teradyne T666 Static tester [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] $350 [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] 01230 [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] Four (4) pallats of misc. back end spare parts [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] (all new) [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] SOLD [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] (Over $100K value new) 01231 [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] Ecosys Exhaust scrubber [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] $500 [http://rs6.net/tn.jsp?e=001OnwmlQkf9Xj_TYlUB6OHhSRQRJhVtqfuQBcUF88fuwTuUJbzBIEJHfLf_LD3FQXjBOmNHRTTmAEAeT9fVVBSBVD2zyu5P7RZplrq6kZ4M9ySI1mxtLj2CxL5KxtSKfVUBUJ6ymvOt6yglFl1ZiWV_VQlJasYT-1w] All bids must be made by either official bid form below or on company letterhead with the below information and returned by email, fax or other form of postal mail and must be received prior to auction closing date and time. Bids can be made on individual equipment or on multiple tools with a single bulk price. Successful buyer is responsible for any taxes, shipping and crating costs associated with the removal of tools and/or parts. Removal must be completed within two weeks of auction close unless special arrangements have been made between buyer and Global Fab Surplus in advance. All tools and parts are sold as-is where-is with no warranties expressed or implied. Everything is FOB ex works. OEM software license transfers fees are the responsibility of the buyer. Payments terms as follows: ? 20% non-refundable deposit within 72 hours of auction close. ? 80% within 5 business days after auction close and prior to removal Global Fab Surplus reserves the right to: ? Refuse any bids turned in late or bids that do not meet the minimum requirements. ? Extend the auction dates ? Close the auction or remove a tool from auction early without notice ? Make award on factors other than costs. ? Auction is subject to G-Fabs standard terms and conditions available on request. Bid form must be complete and signed. Copies of the bid form can be provided by email or fax on request. All bids in written form are considered a legal binding agreement between bidder and Global Fab Surplus. If awarded, the winning bid buyer is legally bound by the laws of the state of Colorado and is responsible for all payments in full. ALL Terms and Conditions (T's & C's) listed in the Global Fab Surplus T's & C's are in effect and cannot be over ridden by any other without prior written agreement between all parties. A copy of these are available on request or by clicking here. Required information to place a bid includes: Date of Proposal: Company Main Phone number: Street Address: Primary Contact: Direct Phone #: Email Address: Secondary Contact: Secondary Phone #: Secondary Email: Item #: Description: Bid Price: ~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ Global Fab Surplus Semiconductor Equipment LLC [http://rs6.net/tn.jsp?e=001OnwmlQkf9XiKPTfyErXKzv_5AMyYFwKgmTAo9ZupWWEbLdHBGlDaDxIeYVh-HsAeGdn3BdnOMYN39GVt9So2AnSXQwPzSs-2QcmKwdmLfutK1rbq941z6A==], provides surplus, used, rebuilt and refurbished semiconductor process equipment to integrated device manufacturers, wafer foundries, research and development sites and to the semiconductor refurbishing and rebuilding community. We buy and sell used semiconductor equipment, including backend, front end and special application tools and toolsets. Visit us online at: www.global-fab.com [http://rs6.net/tn.jsp?e=001OnwmlQkf9XiKPTfyErXKzv_5AMyYFwKgmTAo9ZupWWEbLdHBGlDaDxIeYVh-HsAeGdn3BdnOMYN39GVt9So2AnSXQwPzSs-2QcmKwdmLfutK1rbq941z6A==] for a complete list of tools available. ~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ Forward email http://ui.constantcontact.com/sa/fwtf.jsp?m=1101401002153&ea=specmat at snf.stanford.edu&a=1102264373312 This email was sent to specmat at snf.stanford.edu by patricia.carlson at global-fab.com. Update Profile/Email Address http://visitor.constantcontact.com/d.jsp?v=001RO3dPrXHwIHjNc18qg2uYpS-p4D8dFWv_9au_g5MXPoZBDhM_lv7rVjqjt0j-yJToBpvE6L4E9c%3D&p=oo Instant removal with SafeUnsubscribe(TM) http://visitor.constantcontact.com/d.jsp?v=001RO3dPrXHwIHjNc18qg2uYpS-p4D8dFWv_9au_g5MXPoZBDhM_lv7rVjqjt0j-yJToBpvE6L4E9c%3D&p=un Privacy Policy: http://ui.constantcontact.com/roving/CCPrivacyPolicy.jsp Global Fab Surplus | 195 Kirkstone Lane | Colorado Springs | CO | 80906 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Thu Oct 2 19:17:58 2008 From: mtang at stanford.edu (Mary Tang) Date: Thu, 02 Oct 2008 19:17:58 -0700 Subject: [Fwd: Lampoly with Aluminum] Message-ID: <48E580D6.7050701@stanford.edu> Hi all -- Think of this as another tangible test case. What do you think? Mary -------- Original Message -------- Subject: Lampoly with Aluminum Date: Thu, 2 Oct 2008 17:14:02 -0700 From: Joey Doll To: Mary Tang CC: Bryan Petzold Hi Mary - Here's a paragraph re: metal in lampoly: In order to release microcantilevers fabricated on SOI wafers, a frontside silicon etch is required. Ideally this etch would be uniform within a few % across the wafer, stop on the buried oxide and have vertical sidewalls without scalloping (as in DRIE) for low noise. In order to minimize the topography on the wafer for lithography steps, it is best to release the cantilever as one of the last steps, after the deposition and patterning of aluminum bondpads. We propose allowing the introduction of wafers with standard metals (Al, Ti, W) into lampoly if the metal is protected by photoresist and not exposed to the plasma, much like the policy on STSEtch. As in the case of STS, the etch chamber is aluminum already, so keeping aluminum at least out of the chamber is somewhat of a moot point, and the wafer is cooled on the backside, keeping temperatures down and the metals at the surface of the wafer so that they can be removed by a subsequent diffusion clean. However, the metal on the wafer would not be exposed to the plasma under normal operation, and again much like STS and drytek2, it should be possible to keep the tool in the clean/semiclean category so that clean wafers coming into it could still go back into the tubes afterwards while semiclean wafers coming in remain semiclean going out. Let us know what you think. We have wafers with some aluminum on them right now that we would be interested in etching as soon as possible, but titanium is something we'll be using in about two weeks. Thanks, Joey -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mcvittie at cis.Stanford.EDU Thu Oct 2 22:19:05 2008 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Thu, 2 Oct 2008 22:19:05 -0700 (PDT) Subject: [Fwd: Lampoly with Aluminum] In-Reply-To: <48E580D6.7050701@stanford.edu> Message-ID: Mary, My concern is the case where a user lets the etch go through the resist and exposes Al. The Al would be attacked by the Br and Cl and end up on the walls where it is would increase the recombination rates and affect subsequent Si etch rates and uniformity. THe resist selectivity is only 3:1 at best in the Lam. Jim On Thu, 2 Oct 2008, Mary Tang wrote: > Hi all -- > > Think of this as another tangible test case. What do you think? > > Mary > > -------- Original Message -------- > Subject: Lampoly with Aluminum > Date: Thu, 2 Oct 2008 17:14:02 -0700 > From: Joey Doll > To: Mary Tang > CC: Bryan Petzold > > > > Hi Mary - > Here's a paragraph re: metal in lampoly: > > In order to release microcantilevers fabricated on SOI wafers, a > frontside silicon etch is required. Ideally this etch would be uniform > within a few % across the wafer, stop on the buried oxide and have > vertical sidewalls without scalloping (as in DRIE) for low noise. In > order to minimize the topography on the wafer for lithography steps, it > is best to release the cantilever as one of the last steps, after the > deposition and patterning of aluminum bondpads. We propose allowing the > introduction of wafers with standard metals (Al, Ti, W) into lampoly if > the metal is protected by photoresist and not exposed to the plasma, > much like the policy on STSEtch. As in the case of STS, the etch chamber > is aluminum already, so keeping aluminum at least out of the chamber is > somewhat of a moot point, and the wafer is cooled on the backside, > keeping temperatures down and the metals at the surface of the wafer so > that they can be removed by a subsequent diffusion clean. However, the > metal on the wafer would not be exposed to the plasma under normal > operation, and again much like STS and drytek2, it should be possible to > keep the tool in the clean/semiclean category so that clean wafers > coming into it could still go back into the tubes afterwards while > semiclean wafers coming in remain semiclean going out. > > Let us know what you think. We have wafers with some aluminum on them > right now that we would be interested in etching as soon as possible, > but titanium is something we'll be using in about two weeks. > > Thanks, > Joey > > -- -------------------------------------------------------------- Jim McVittie, Ph.D. Senior Research Scientist Allen Center for Integrated Systems Electrical Engineering Stanford University jmcvittie at stanford.edu Rm. 336, 330 Serra Mall Fax: (650) 723-4659 Stanford, CA 94305-4075 Tel: (650) 725-3640 From mahnaz at stanford.edu Tue Oct 7 16:55:24 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 07 Oct 2008 16:55:24 -0700 Subject: Request Approval for SIPR - 9684M-3.0 In-Reply-To: <8a37d7c00809101228y66c0f6abl625a1c9fb8a2d511@mail.gmail.com> References: <8a37d7c00809101228y66c0f6abl625a1c9fb8a2d511@mail.gmail.com> Message-ID: <48EBF6EC.3060500@stanford.edu> Hello Aleta, This is to let you know this chemical is approved for use at SNF. One thin though you mentioned about the other resist with different viscosity, I have two emails from you and the other email is for the same chemical as above. Do you mind sending it one more time please. mahnaz Aleta Jamora wrote: > > > Hello Spec Mat, > > I would like to bring in a new positive resist, SIPR 9684M-3.0 > The purpose of this resist is to print single layer lift-off patterns. > > I am planning on bringing the samples in in 8 oz brown bottles (like > we have in the store room) and storing them > in the Flammables cabinet that we have (shelf L) along with the other > photo-resist samples. My intention is to use these resists to coat > 3 and 4 inch Silicon wafers on the Headway spinner (3-7 um thick) > and soft > bake the resist on the hotplates that are adjacent to the Headway. > I am > planning on using the Karl Seuss aligners to expose the wafers, and then > I will develop the patterns at the develop bench in beakers using > LDD-26W > or which ever MIF developer is available at SNF. > Disposal and clean up of these materials should follow the standard > procedures for DQN positive photoresists - bagging contaminated > clean room > wipes, foil & empty bottles and putting them in the designated > chemical trash > bins. The resists themselves can be dispensed in the chemical carboys > for organics in the solvent hoods for disposal. The used LDD-26W > developer containing the resist will go down the drain at > the develop bench. > I am attaching a PDF file of the MSDS sheet for this resist. > > Thanks > > > > > > -Aleta Jamora > > > > > > Translucent Inc > > > 510 378 1602 > > > artyjamo at comcast.net > From mahnaz at stanford.edu Tue Oct 7 17:07:13 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 07 Oct 2008 17:07:13 -0700 Subject: Fwd: SIPR 9684HM-5.0 In-Reply-To: <8a37d7c00809111408j224797d2l720f0499705f752c@mail.gmail.com> References: <8a37d7c00809111407v4c644773vb33fcff6a0aa366b@mail.gmail.com> <8a37d7c00809111408j224797d2l720f0499705f752c@mail.gmail.com> Message-ID: <48EBF9B1.9080002@stanford.edu> Hello Aleta, Never mind, I found it. This is to confirm that you may use the chemical, Please stop by and get all the labels and fill out the paper work. Be aware that we are short of space. mahnaz Aleta Jamora wrote: > Sorry, forgot to attach the MSDS file > > ---------- Forwarded message ---------- > From: *Aleta Jamora* > > Date: Thu, Sep 11, 2008 at 2:07 PM > Subject: SIPR 9684HM-5.0 > To: specmat stanford > > > > Hello Spec Mat, > > I would like to bring in a new positive resist, SIPR 9684HM-5 > The purpose of this resist is to print single layer lift-off patterns. > > I am planning on bringing the samples in in 8 oz brown bottles (like > we have in the store room) and storing them > in the Flammables cabinet that we have (shelf L) along with the other > photo-resist samples. My intention is to use these resists to coat > 3 and 4 inch Silicon wafers on the Headway spinner (7-12 um thick) > and soft > bake the resist on the hotplates that are adjacent to the Headway. > I am > planning on using the Karl Seuss aligners to expose the wafers, and then > I will develop the patterns at the develop bench in beakers using > LDD-26W > or which ever MIF developer is available at SNF. > Disposal and clean up of these materials should follow the standard > procedures for DQN positive photoresists - bagging contaminated > clean room > wipes, foil & empty bottles and putting them in the designated > chemical trash > bins. The resists themselves can be dispensed in the chemical carboys > for organics in the solvent hoods for disposal. The used LDD-26W > developer containing the resist will go down the drain at > the develop bench. > I am attaching a PDF file of the MSDS sheet for this resist. > > Thanks > > Aleta Jamora > Translucent Inc > (510 378 1602) > From patricia.carlson at global-fab.com Mon Oct 13 01:04:22 2008 From: patricia.carlson at global-fab.com (Patricia Carlson) Date: Mon, 13 Oct 2008 04:04:22 -0400 (EDT) Subject: Manufacturing Equipment Auction Reminder Message-ID: <1102278512417.1101401002153.9044.6.44040046@scheduler> G-Fab LOGO [http://rs6.net/tn.jsp?e=00195CfmpW3bz9H6Gc8Tu4tP4ZtWZjxT2w_x1RWABejAS6gPiyZMBABsp0hCIjCldj3mjL6gOR5TgDSQ9xENlushv3GN3FnWKrRW1Md_T4RvlPA7z7qotwfdw==] ~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ Global Fab Surplus LLC (G-Fab) auction of our remaining inventory is ending soon. We are auctioning off all our remaining equipment to the highest bidder. The inventory is located in our Colorado Springs warehouse unless otherwise stated. Included in the inventory are Semiconductor process, facility and test systems. Below is a full list. All Spec sheets are available on request. Click here for specs and pictures [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8]. Bidding will end on October 24, 2008 at close of business Pacific time. BID NOW..... TIME IS RUNNING OUT SOON. Inspections can be arranged at any time. Some tools have already been crated and barrier bagged for international shipping. If you are interested in a "buy it now" price on anything just send us an email. The tools WILL sell to the highest bidder or the first Buy it Now offer on each tool. Equipment list Item # Description Minimum Bid 01219 IPEC 372m CMP (Very Clean) $15,000 01220 IPEC 372m CMP (Very Clean) $15,000 01221 [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] IPEC 372m CMP [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] (Very Clean) [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] SOLD [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] 01222 [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] IPEC 372m CMP [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] (Very Clean) [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] SOLD [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] 01223 [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] IPEC 676 CMP [http://rs6.net/tn.jsp?e=00195CfmpW3bz_vMpCAqm5Si1W0cfif5BUULAiluRaAyGKajllp5s-voFlWkLns75FFcdeKfrLryE-Da43gubo5Lbbt5bmGRhwtLUkUjlFAQGD-V8qulDgV7RSvVEMoYDSnJOvQMzobICU4C08CsCRXzBoSO8SA-h1jHNryJygYuKg=] (Very clean) [http://rs6.net/tn.jsp?e=00195CfmpW3bz_vMpCAqm5Si1W0cfif5BUULAiluRaAyGKajllp5s-voFlWkLns75FFcdeKfrLryE-Da43gubo5Lbbt5bmGRhwtLUkUjlFAQGD-V8qulDgV7RSvVEMoYDSnJOvQMzobICU4C08CsCRXzBoSO8SA-h1jHNryJygYuKg=] SOLD 01224 [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] LAM Alliance A4 etcher [http://rs6.net/tn.jsp?e=00195CfmpW3bz-nfTPu6EPn4afJb08Ow1gUO18eZfRvSC6fB8cSsF0Nem4a8doJs2DKrUPXDC1SrKR04NJJBNudzQf8Ovcm8mntcCiaeeQxQtnZ29QVGeA-0sOvmu6U5bsZY3Lu7w_xDEZmxIfiXB7-Mv_4nn30x64g4bKxXYMUFhqwXLpqPxWu6HvKWK7yRbV7MWaLjy4PFAM=] SOLD (4520XL (oxide etch) chamber, TCP9400SE (polyetch), RF Gen Rack, Pump Stack, [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] Gas Cabinets, Electrical Cabinet and accessories (computers,etc.) [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] 01225 [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] LAM Rainbow 4428 (In like new condition) [http://rs6.net/tn.jsp?e=00195CfmpW3bz_E3efwHDIVbaHHrLJ5A7Cqc8hnOYWLISAHXKzZyH4jIVPFFg5jL52hCx7MSEtqp__O5JyZj2gJH9qw6cu4YalO_4-b7D4avpK7Fdw12Ex--VvLq2QOk3dwAaucDHgkF2lPXcc3h9QLicWyKdrKXh9oJuwYdlycfb8yyGJ0tl_vgg==] $30,000 01226 [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] Biorad/Accent Q7 Overlay system [http://rs6.net/tn.jsp?e=00195CfmpW3bz-ZZUoF0jPVWZc0AGu76Sd1firj8SeLM-l6nPeNjrtvGMrnbNIz8AAEcMWlxsOCrc15NpYSMaXAB999ZzfuTpA5A4O5al8F4J97osHDn9_Q0_dLt6xZWvbAMn-9HDWSYD4TkrAH2lm8cVFYjRfCcEqVMA5K25RfTKuter9_9FjyAg==] (Very Clean) [http://rs6.net/tn.jsp?e=00195CfmpW3bz-ZZUoF0jPVWZc0AGu76Sd1firj8SeLM-l6nPeNjrtvGMrnbNIz8AAEcMWlxsOCrc15NpYSMaXAB999ZzfuTpA5A4O5al8F4J97osHDn9_Q0_dLt6xZWvbAMn-9HDWSYD4TkrAH2lm8cVFYjRfCcEqVMA5K25RfTKuter9_9FjyAg==] $30,000 01227 [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] SVG 90s I-Line Tracks [http://rs6.net/tn.jsp?e=00195CfmpW3bz-sFKk-Zu5P7gTcicWoRQJyUtJMXPg3_4ykLtNAMBDx8edySjdeTtXzrdLaahNGQH6eF1FGX756XAL_SUWs671-LEBSmikFAH2qKVB5WT9WM7q7kP-umBWZ2_wCSa0Q2H3eNlQPXJNSzFEbSoA6MeZ6gGn0KNpRuIkwP5P0ekELzA==] (Very Clean) [http://rs6.net/tn.jsp?e=00195CfmpW3bz-sFKk-Zu5P7gTcicWoRQJyUtJMXPg3_4ykLtNAMBDx8edySjdeTtXzrdLaahNGQH6eF1FGX756XAL_SUWs671-LEBSmikFAH2qKVB5WT9WM7q7kP-umBWZ2_wCSa0Q2H3eNlQPXJNSzFEbSoA6MeZ6gGn0KNpRuIkwP5P0ekELzA==] $10,000 01228 [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] SVG 90s I-Line Tracks [http://rs6.net/tn.jsp?e=00195CfmpW3bz-sFKk-Zu5P7gTcicWoRQJyUtJMXPg3_4ykLtNAMBDx8edySjdeTtXzrdLaahNGQH6eF1FGX756XAL_SUWs671-LEBSmikFAH2qKVB5WT9WM7q7kP-umBWZ2_wCSa0Q2H3eNlQPXJNSzFEbSoA6MeZ6gGn0KNpRuIkwP5P0ekELzA==] (Very Clean) [http://rs6.net/tn.jsp?e=00195CfmpW3bz-sFKk-Zu5P7gTcicWoRQJyUtJMXPg3_4ykLtNAMBDx8edySjdeTtXzrdLaahNGQH6eF1FGX756XAL_SUWs671-LEBSmikFAH2qKVB5WT9WM7q7kP-umBWZ2_wCSa0Q2H3eNlQPXJNSzFEbSoA6MeZ6gGn0KNpRuIkwP5P0ekELzA==] $10,000 01229 [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] Teradyne T666 Static tester [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] $350 [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] 01230 [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] Four (4) pallats of misc. back end spare parts [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] (all new) [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] SOLD [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] (Over $100K value new) 01231 [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] Ecosys Exhaust scrubber [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] $500 [http://rs6.net/tn.jsp?e=00195CfmpW3bz-r35-uddk5OdvgFAP0jm8b4wAg46fxEf3SiqdAWRijJDIe8Kk3xHIp4nNgOu-mS5hMW_ZKreQybT0MrGzL1axc0ORo27GbVpXLLPMxVLCZChz4Lag6F4wKqyGz1qfmeSK8Sd1nr2mr2-iHF2vKAgF8] All bids must be made by either official bid form below or on company letterhead with the below information and returned by email, fax or other form of postal mail and must be received prior to auction closing date and time. Bids can be made on individual equipment or on multiple tools with a single bulk price. Successful buyer is responsible for any taxes, shipping and crating costs associated with the removal of tools and/or parts. Removal must be completed within two weeks of auction close unless special arrangements have been made between buyer and Global Fab Surplus in advance. All tools and parts are sold as-is where-is with no warranties expressed or implied. Everything is FOB ex works. OEM software license transfers fees are the responsibility of the buyer. Payments terms as follows: ? 20% non-refundable deposit within 72 hours of auction close. ? 80% within 5 business days after auction close and prior to removal Global Fab Surplus reserves the right to: ? Refuse any bids turned in late or bids that do not meet the minimum requirements. ? Extend the auction dates ? Close the auction or remove a tool from auction early without notice ? Make award on factors other than costs. ? Auction is subject to G-Fabs standard terms and conditions available on request. Bid form must be complete and signed. Copies of the bid form can be provided by email or fax on request. All bids in written form are considered a legal binding agreement between bidder and Global Fab Surplus. If awarded, the winning bid buyer is legally bound by the laws of the state of Colorado and is responsible for all payments in full. ALL Terms and Conditions (T's & C's) listed in the Global Fab Surplus T's & C's are in effect and cannot be over ridden by any other without prior written agreement between all parties. A copy of these are available on request or by clicking here. Required information to place a bid includes: Date of Proposal: Company Main Phone number: Street Address: Primary Contact: Direct Phone #: Email Address: Secondary Contact: Secondary Phone #: Secondary Email: Item #: Description: Bid Price: ~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ Global Fab Surplus Semiconductor Equipment LLC [http://rs6.net/tn.jsp?e=00195CfmpW3bz9H6Gc8Tu4tP4ZtWZjxT2w_x1RWABejAS6gPiyZMBABsp0hCIjCldj3mjL6gOR5TgDSQ9xENlushv3GN3FnWKrRW1Md_T4RvlPA7z7qotwfdw==], provides surplus, used, rebuilt and refurbished semiconductor process equipment to integrated device manufacturers, wafer foundries, research and development sites and to the semiconductor refurbishing and rebuilding community. We buy and sell used semiconductor equipment, including backend, front end and special application tools and toolsets. Visit us online at: www.global-fab.com [http://rs6.net/tn.jsp?e=00195CfmpW3bz9H6Gc8Tu4tP4ZtWZjxT2w_x1RWABejAS6gPiyZMBABsp0hCIjCldj3mjL6gOR5TgDSQ9xENlushv3GN3FnWKrRW1Md_T4RvlPA7z7qotwfdw==] for a complete list of tools available. ~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ Forward email http://ui.constantcontact.com/sa/fwtf.jsp?m=1101401002153&ea=specmat at snf.stanford.edu&a=1102278512417 This email was sent to specmat at snf.stanford.edu by patricia.carlson at global-fab.com. Update Profile/Email Address http://visitor.constantcontact.com/d.jsp?v=001RO3dPrXHwIHjNc18qg2uYpS-p4D8dFWvwEvozy5BkyODiijWIyLnNI54KR7ix0oO3OjPkf_aRwM%3D&p=oo Instant removal with SafeUnsubscribe(TM) http://visitor.constantcontact.com/d.jsp?v=001RO3dPrXHwIHjNc18qg2uYpS-p4D8dFWvwEvozy5BkyODiijWIyLnNI54KR7ix0oO3OjPkf_aRwM%3D&p=un Privacy Policy: http://ui.constantcontact.com/roving/CCPrivacyPolicy.jsp Global Fab Surplus | 195 Kirkstone Lane | Colorado Springs | CO | 80906 -------------- next part -------------- An HTML attachment was scrubbed... URL: From audet at stanford.edu Sun Oct 19 16:33:57 2008 From: audet at stanford.edu (Ross Audet) Date: Sun, 19 Oct 2008 16:33:57 -0700 Subject: new chemical request: Waferbond spin on polymer Message-ID: <004c01c93243$282b8c30$7882a490$@edu> Dear Specmat committee, Please see the attached document requesting permission to use of Brewer Waferbond in the SNF cleanroom. Contact me with any questions. Regards, Ross Audet -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: audet_waferbond_specmat_request_19oct2008.pdf Type: application/pdf Size: 991123 bytes Desc: not available URL: From patricia.carlson at global-fab.com Sun Oct 19 23:48:21 2008 From: patricia.carlson at global-fab.com (Patricia Carlson) Date: Mon, 20 Oct 2008 02:48:21 -0400 (EDT) Subject: Semiconductor Manufacturing Equipment Auction Reminder Message-ID: <1102287921134.1101401002153.9044.6.44024546@scheduler> G-Fab LOGO [http://rs6.net/tn.jsp?e=001TBhlJbJdz2la3xLRyX0GQ__kFAQtvwmR-1pVTTXsKd9IAEMVEfBXwOwJ5XeWmVrOI8pnqGN43NWIvTmxLmuA8ptWu4hUcsEqgaFbGwEIDwSCLLeo1F9tig==] ~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ Global Fab Surplus LLC (G-Fab) auction of our remaining inventory is ending soon. We are auctioning off all our remaining equipment to the highest bidder. The inventory is located in our Colorado Springs warehouse unless otherwise stated. Included in the inventory are Semiconductor process, facility and test systems. Below is a full list. All Spec sheets are available on request. Click here for specs and pictures [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE]. Bidding will end on October 24, 2008 at close of business Pacific time. BID NOW..... TIME IS RUNNING OUT SOON. Inspections can be arranged at any time. Some tools have already been crated and barrier bagged for international shipping. If you are interested in a "buy it now" price on anything just send us an email. The tools WILL sell to the highest bidder or the first Buy it Now offer on each tool. Equipment list Item # Description Minimum Bid 01219 IPEC 372m CMP (Very Clean) $15,000 01220 IPEC 372m CMP (Very Clean) $15,000 01221 [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] IPEC 372m CMP [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] (Very Clean) [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] SOLD [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] 01222 [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] IPEC 372m CMP [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] (Very Clean) [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] SOLD [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] 01223 [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] IPEC 676 CMP [http://rs6.net/tn.jsp?e=001TBhlJbJdz2l7NlxLoENqWUKUEJzDi8nCR9J477ry5KE_0JZmzn-IDyp1HDQtHEYiGqPKf3SaGalfmXb9jFl6QNHfoVtwvpeyzR68NVUUD8qZ4JCzuZ-3tdKmSclkxXN2EoAUG3rLuKS4hhaMS-zdD0_N8L5dN1HkRc8JffKnmww=] (Very clean) [http://rs6.net/tn.jsp?e=001TBhlJbJdz2l7NlxLoENqWUKUEJzDi8nCR9J477ry5KE_0JZmzn-IDyp1HDQtHEYiGqPKf3SaGalfmXb9jFl6QNHfoVtwvpeyzR68NVUUD8qZ4JCzuZ-3tdKmSclkxXN2EoAUG3rLuKS4hhaMS-zdD0_N8L5dN1HkRc8JffKnmww=] SOLD 01224 [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] LAM Alliance A4 etcher [http://rs6.net/tn.jsp?e=001TBhlJbJdz2lamVBYElBjMmMCDN_L4OIt6KlT3w2qD2KriupDEX1l3jpQpV0qrGpUswJtdcGOG0Sv4qiYAFl_EhqsOvEB8qmcM_5bY7LzByax9D-aIP9g19cW8wHFS7jcsdXsqSvXSnyMVdfmo5ZqX6fzipMyniDOB2ZWUY2A--vf3xqYouWCKAk7i3XKz5plqzC3AnLpBSc=] SOLD (4520XL (oxide etch) chamber, TCP9400SE (polyetch), RF Gen Rack, Pump Stack, [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] Gas Cabinets, Electrical Cabinet and accessories (computers,etc.) [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] 01225 [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] LAM Rainbow 4428 (In like new condition) [http://rs6.net/tn.jsp?e=001TBhlJbJdz2l3uxa9Wz9iBOegEkghOZN34mR-DPX9paS5dg-bKOPtiF560MwqWjK0p6SAAbpQacYKS8WmqnhiF1lOkprqqwv35XOM_bu_CfFnQP54Ihoc0aIwzm8KnaRAQ_fswMjIeeydhJqsEJiWGWvors46CelDC-jsnJJHO7uPnzIYd4jDfQ==] $30,000 01226 [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] Biorad/Accent Q7 Overlay system [http://rs6.net/tn.jsp?e=001TBhlJbJdz2nUK_xGHRIP3jsDtFOtvclkr4roGUJTx38ZH9C07M_-WI9tzkS8_P_GKkAH-ShyAPycxJD6ctTSW_2fu6MGfnJtojoGa9oHwIK0x2ftXp5mSzDnfpmIhqlhSvVR1MC7BvRAyuO30qAwU8VMb4s8M6xIoEvtrrcZYRVNIxUE7gbzbg==] (Very Clean) [http://rs6.net/tn.jsp?e=001TBhlJbJdz2nUK_xGHRIP3jsDtFOtvclkr4roGUJTx38ZH9C07M_-WI9tzkS8_P_GKkAH-ShyAPycxJD6ctTSW_2fu6MGfnJtojoGa9oHwIK0x2ftXp5mSzDnfpmIhqlhSvVR1MC7BvRAyuO30qAwU8VMb4s8M6xIoEvtrrcZYRVNIxUE7gbzbg==] $30,000 01227 [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] SVG 90s I-Line Tracks [http://rs6.net/tn.jsp?e=001TBhlJbJdz2mpR6epOnL0A6oslHwK4UEkojGkIT5klZYmjTrS6Npmi2kdkCnyE0BCnam7QbUeKs0srO7W1sGwqYlUBUoVOOeOay7zMR1I9ma9Un4EQqlsDKxEAwaBartmpoG-Qi8fmRm5V8FaFpZp398eSm3yzKHf1io3r4r0CAqSpP-RHh9SXg==] (Very Clean) [http://rs6.net/tn.jsp?e=001TBhlJbJdz2mpR6epOnL0A6oslHwK4UEkojGkIT5klZYmjTrS6Npmi2kdkCnyE0BCnam7QbUeKs0srO7W1sGwqYlUBUoVOOeOay7zMR1I9ma9Un4EQqlsDKxEAwaBartmpoG-Qi8fmRm5V8FaFpZp398eSm3yzKHf1io3r4r0CAqSpP-RHh9SXg==] $10,000 01228 [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] SVG 90s I-Line Tracks [http://rs6.net/tn.jsp?e=001TBhlJbJdz2mpR6epOnL0A6oslHwK4UEkojGkIT5klZYmjTrS6Npmi2kdkCnyE0BCnam7QbUeKs0srO7W1sGwqYlUBUoVOOeOay7zMR1I9ma9Un4EQqlsDKxEAwaBartmpoG-Qi8fmRm5V8FaFpZp398eSm3yzKHf1io3r4r0CAqSpP-RHh9SXg==] (Very Clean) [http://rs6.net/tn.jsp?e=001TBhlJbJdz2mpR6epOnL0A6oslHwK4UEkojGkIT5klZYmjTrS6Npmi2kdkCnyE0BCnam7QbUeKs0srO7W1sGwqYlUBUoVOOeOay7zMR1I9ma9Un4EQqlsDKxEAwaBartmpoG-Qi8fmRm5V8FaFpZp398eSm3yzKHf1io3r4r0CAqSpP-RHh9SXg==] $10,000 01229 [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] Teradyne T666 Static tester [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] $350 [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] 01230 [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] Four (4) pallats of misc. back end spare parts [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] (all new) [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] SOLD [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] (Over $100K value new) 01231 [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] Ecosys Exhaust scrubber [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] $500 [http://rs6.net/tn.jsp?e=001TBhlJbJdz2n-NQl221df_wD78CmoCwqDQgtEokeuKxfQvbz-B-TY-ya7QABSeefQV6Ieswep-ekXtAQoUR9gIPJy4PqtGj8enFFxK1NlXcoxWobHG6JnXhWoivet15l59oU8c9wH5aQJ2sYYLn0qJHLXLiWWNSPE] All bids must be made by either official bid form below or on company letterhead with the below information and returned by email, fax or other form of postal mail and must be received prior to auction closing date and time. Bids can be made on individual equipment or on multiple tools with a single bulk price. Successful buyer is responsible for any taxes, shipping and crating costs associated with the removal of tools and/or parts. Removal must be completed within two weeks of auction close unless special arrangements have been made between buyer and Global Fab Surplus in advance. All tools and parts are sold as-is where-is with no warranties expressed or implied. Everything is FOB ex works. OEM software license transfers fees are the responsibility of the buyer. Payments terms as follows: ? 20% non-refundable deposit within 72 hours of auction close. ? 80% within 5 business days after auction close and prior to removal Global Fab Surplus reserves the right to: ? Refuse any bids turned in late or bids that do not meet the minimum requirements. ? Extend the auction dates ? Close the auction or remove a tool from auction early without notice ? Make award on factors other than costs. ? Auction is subject to G-Fabs standard terms and conditions available on request. Bid form must be complete and signed. Copies of the bid form can be provided by email or fax on request. All bids in written form are considered a legal binding agreement between bidder and Global Fab Surplus. If awarded, the winning bid buyer is legally bound by the laws of the state of Colorado and is responsible for all payments in full. ALL Terms and Conditions (T's & C's) listed in the Global Fab Surplus T's & C's are in effect and cannot be over ridden by any other without prior written agreement between all parties. A copy of these are available on request or by clicking here. Required information to place a bid includes: Date of Proposal: Company Main Phone number: Street Address: Primary Contact: Direct Phone #: Email Address: Secondary Contact: Secondary Phone #: Secondary Email: Item #: Description: Bid Price: ~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ Global Fab Surplus Semiconductor Equipment LLC [http://rs6.net/tn.jsp?e=001TBhlJbJdz2la3xLRyX0GQ__kFAQtvwmR-1pVTTXsKd9IAEMVEfBXwOwJ5XeWmVrOI8pnqGN43NWIvTmxLmuA8ptWu4hUcsEqgaFbGwEIDwSCLLeo1F9tig==], provides surplus, used, rebuilt and refurbished semiconductor process equipment to integrated device manufacturers, wafer foundries, research and development sites and to the semiconductor refurbishing and rebuilding community. We buy and sell used semiconductor equipment, including backend, front end and special application tools and toolsets. Visit us online at: www.global-fab.com [http://rs6.net/tn.jsp?e=001TBhlJbJdz2la3xLRyX0GQ__kFAQtvwmR-1pVTTXsKd9IAEMVEfBXwOwJ5XeWmVrOI8pnqGN43NWIvTmxLmuA8ptWu4hUcsEqgaFbGwEIDwSCLLeo1F9tig==] for a complete list of tools available. ~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ Forward email http://ui.constantcontact.com/sa/fwtf.jsp?m=1101401002153&ea=specmat at snf.stanford.edu&a=1102287921134 This email was sent to specmat at snf.stanford.edu by patricia.carlson at global-fab.com. Update Profile/Email Address http://visitor.constantcontact.com/d.jsp?v=001RO3dPrXHwIHjNc18qg2uYpS-p4D8dFWvR_1qnp4E7C1MJuqKokoscKOL0vPVaNotZjy9DWpOfa4%3D&p=oo Instant removal with SafeUnsubscribe(TM) http://visitor.constantcontact.com/d.jsp?v=001RO3dPrXHwIHjNc18qg2uYpS-p4D8dFWvR_1qnp4E7C1MJuqKokoscKOL0vPVaNotZjy9DWpOfa4%3D&p=un Privacy Policy: http://ui.constantcontact.com/roving/CCPrivacyPolicy.jsp Global Fab Surplus | 195 Kirkstone Lane | Colorado Springs | CO | 80906 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Mon Oct 20 10:57:36 2008 From: mtang at stanford.edu (Mary Tang) Date: Mon, 20 Oct 2008 10:57:36 -0700 Subject: [POSSIBLE VIRUS:###] [Fwd: Erbium in RTAgaas and amtetcher?] Message-ID: <15845_1224525448_48FCC688_15845_232_1_48FCC690.8040706@stanford.edu> Hi all -- So, what's the opinion on Erbium? This is <1% in polysilicon. Mary -------------- next part -------------- An embedded message was scrubbed... From: "Aaron Hryciw" Subject: Erbium in RTAgaas and amtetcher? Date: Mon, 20 Oct 2008 10:33:43 -0700 Size: 3536 URL: From mdeal at stanford.edu Mon Oct 20 11:23:47 2008 From: mdeal at stanford.edu (Michael Deal) Date: Mon, 20 Oct 2008 11:23:47 -0700 Subject: [POSSIBLE VIRUS:###] [Fwd: Erbium in RTAgaas and amtetcher?] In-Reply-To: <15845_1224525448_48FCC688_15845_232_1_48FCC690.8040706@stanford.edu> References: <15845_1224525448_48FCC688_15845_232_1_48FCC690.8040706@stanford.edu> Message-ID: <48FCCCB3.1030002@stanford.edu> An HTML attachment was scrubbed... URL: From junjun at twincreekstechnologies.com Mon Oct 20 14:27:19 2008 From: junjun at twincreekstechnologies.com (Wu Junjun) Date: Mon, 20 Oct 2008 14:27:19 -0700 Subject: request for new sputtering target materials for Metalica Message-ID: <37B0FB1B-AEB6-4719-AE17-21997D86AEED@twincreekstechnologies.com> 1. Contact information Junjun Wu; Coral login: junjun; phone: 408-759-1426; Company: Twin Creeks Technologies 2. Material TiAl, TiAl3, TaAl, TaAl3 alloys in sintered disk forms. 1" in diameter and 1/8" in thickness. These are expected to be refractory alloys. 3. Vendor info ACI Alloys, phone: 408-259-7337. www.acialloys.com 4. Reason for request Use as metal contact to silicon. Not available at SNF. 5. Process flow metal deposit on silicon with Metalica -> bond to Pyrex glass with ev bond -> heat treat in RTAGAAS 6. Amount and form 1 piece of target each in disk form that works as target for Metalica. 7. Storage It will be stored in the area assigned to Twin Creeks. They are non reactive alloys. 8. Disposal We will bring them back to Twin Creeks site for disposal if needed. Thanks for taking the time to consider this request. Please let me know your decision as soon as you can since I need to decide to place an order with the vendor or not in the next couple of days. Junjun Wu Twin Creeks Technologies (cell) 408 - 759 -1426 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Tue Oct 21 08:19:09 2008 From: mtang at stanford.edu (Mary Tang) Date: Tue, 21 Oct 2008 08:19:09 -0700 Subject: request for new sputtering target materials for Metalica In-Reply-To: <37B0FB1B-AEB6-4719-AE17-21997D86AEED@twincreekstechnologies.com> References: <37B0FB1B-AEB6-4719-AE17-21997D86AEED@twincreekstechnologies.com> Message-ID: <48FDF2ED.6090405@stanford.edu> No problems with this request, I take it? How do people feel about sodium in rtagaas? (from the pyrex). Has anyone gotten back to them? Mary Wu Junjun wrote: > 1. Contact information > Junjun Wu; Coral login: junjun; phone: 408-759-1426; Company: Twin > Creeks Technologies > > 2. Material > TiAl, TiAl3, TaAl, TaAl3 alloys in sintered disk forms. 1" in diameter > and 1/8" in thickness. These are expected to be refractory alloys. > > 3. Vendor info > ACI Alloys, phone: 408-259-7337. www.acialloys.com > > > 4. Reason for request > Use as metal contact to silicon. Not available at SNF. > > 5. Process flow > metal deposit on silicon with Metalica -> bond to Pyrex glass with ev > bond -> heat treat in RTAGAAS > > 6. Amount and form > 1 piece of target each in disk form that works as target for Metalica. > > 7. Storage > It will be stored in the area assigned to Twin Creeks. They are non > reactive alloys. > > 8. Disposal > We will bring them back to Twin Creeks site for disposal if needed. > > Thanks for taking the time to consider this request. Please let me > know your decision as soon as you can since I need to decide to place > an order with the vendor or not in the next couple of days. > > Junjun Wu > Twin Creeks Technologies > (cell) 408 - 759 -1426 > > > From bz at amfitzgerald.com Tue Oct 21 17:57:20 2008 From: bz at amfitzgerald.com (Benedikt Zeyen) Date: Tue, 21 Oct 2008 17:57:20 -0700 (PDT) Subject: Brewer Science Protek B3 Message-ID: <54900.99971.qm@web1104.biz.mail.sk1.yahoo.com> Hi, I would like to use BrewerScience Protek B3 (Primer and coating) in the SNF clean room for spin coating and KOH etching. Is this material approved? What restrictions exist? Thank you very much! Contact information: Benedikt Zeyen, bzeyen, 805-284-1856, bz at amfitzgerald.com, A.M. Fitzgerald & Associates Chemical or material: Brewer Science Protek B3 (Primer and coating) MSDS is attached Vendor: Brewer Science, Inc. http://www.brewerscience.com/products/sm/product-information/temporary-etch-protective-coatings/ Reason: Protective layer for Si through wafer KOH etch. Process flow: * Base: Processed silicon wafer, contaminated * Spin on Protek B3 primer (headway) * Bake Protek B3 primer * Spin on Protek B3-25 (headway) * Bake Protek B3-25 with two different temperatures * Etch wafer in heated KOH, dilute etch in DI * Remove Protek B3-25 in Acetone, Isopropanol * Descum in oxide plasma Amount and form: Liquids, 500ml Best, Benedikt Zeyen, Ph.D. Associate A.M. Fitzgerald & Associates, LLC 655 Skyway Rd. Suite 118 San Carlos, CA 94070 +1 (650) 592-6100 x102 phone +1 (650) 592-6111 fax www.amfitzgerald.com -------------- next part -------------- A non-text attachment was scrubbed... Name: Protek B3-25 MSDS.pdf Type: application/pdf Size: 147148 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Protek B3 Primer MSDS.pdf Type: application/pdf Size: 142185 bytes Desc: not available URL: From jameson at stanford.edu Wed Oct 22 15:34:00 2008 From: jameson at stanford.edu (John Ross Jameson) Date: Wed, 22 Oct 2008 15:34:00 -0700 (PDT) Subject: Policy on nanotubes, nanowires, etc. Message-ID: Dear SpecMat, I'd like to do some processing of carbon nanotubes and nanofibers in SNF, and I've gotten different answers about what is allowed and what isn't. What I'd like to do is bring wafers into the fab that have carbon nanotubes or nanofibers sitting horizontally on the surface. The nanotubes/fibers would only be held on by van der Waal forces. That is enough to keep them from blowing off, but not enough to keep them from being rubbed off. I'd like to do a lift-off process to pattern metal on top of the nanotubes/fibers, using either the ASML or EV aligner. For the metal dep, I'd use the innotec or metalica. The lift-off could be done at SNF, or elsewhere if necessary. Would this process be OK to do in SNF? Do I need to check back with you if I decide to try another type of nanotube/wire? Thank you, John From mtang at stanford.edu Thu Oct 23 08:31:51 2008 From: mtang at stanford.edu (Mary Tang) Date: Thu, 23 Oct 2008 08:31:51 -0700 Subject: Policy on nanotubes, nanowires, etc. In-Reply-To: References: Message-ID: <490098E7.6080103@stanford.edu> Hi John -- Our policy on nanotubes has been that: 1. Conducting and semiconducting nanoparticles and nanowires cannot be spun in from solution inside the lab. This is to prevent cross-contamination of other people's work, since spin coating aerosolizes the solution. Ordinary latex nanoparticles are OK on the headway, because they are non-conductive and can be dissolved like most resists. We have a rather crude spin coater outside the lab which is available for spin coating of conductive materials. There are some nicer ones in CPIMA, MatSci and ME labs. 2. Wafers with nanoparticles and nanowires adhered to them can generally be processed as "gold-contaminated" substrates. As you say, van der Waals holds them down through most processing, including spin coating with photoresist. So, the processing you propose should be fine for the most part. The only question I have is with the ASML. As you know, the ASML system belongs to ASML, and they have the final word as to what kind of materials are OK to process in their tool. Ed -- have nanotubes been OK'ed on the ASML? Mary John Ross Jameson wrote: > Dear SpecMat, > > I'd like to do some processing of carbon nanotubes and nanofibers > in SNF, and I've gotten different answers about what is allowed > and what isn't. What I'd like to do is bring wafers into the fab > that have carbon nanotubes or nanofibers sitting horizontally on > the surface. The nanotubes/fibers would only be held on by van der > Waal forces. That is enough to keep them from blowing off, but > not enough to keep them from being rubbed off. I'd like to do a > lift-off process to pattern metal on top of the nanotubes/fibers, > using either the ASML or EV aligner. For the metal dep, I'd use > the innotec or metalica. The lift-off could be done at SNF, or > elsewhere if necessary. > > Would this process be OK to do in SNF? Do I need to check back with > you if I decide to try another type of nanotube/wire? > > Thank you, > John > > > From jameson at stanford.edu Thu Oct 23 09:50:13 2008 From: jameson at stanford.edu (John Ross Jameson) Date: Thu, 23 Oct 2008 09:50:13 -0700 (PDT) Subject: Policy on nanotubes, nanowires, etc. In-Reply-To: <490098E7.6080103@stanford.edu> Message-ID: Hi Mary, Thanks for the quick reply. I'll wait to hear about the ASML policy before I do anything. I would note, however, that the nanotubes would be completely covered with photoresist by the time they reached the ASML. The only issue I could see, then, is that there could possibly be stray nanotubes on the backside of the wafer, if the nanotubes were spun on in a sloppy way. Thanks, John On Thu, 23 Oct 2008, Mary Tang wrote: > Hi John -- > > Our policy on nanotubes has been that: > > 1. Conducting and semiconducting nanoparticles and nanowires cannot be > spun in from solution inside the lab. This is to prevent > cross-contamination of other people's work, since spin coating > aerosolizes the solution. Ordinary latex nanoparticles are OK on the > headway, because they are non-conductive and can be dissolved like most > resists. We have a rather crude spin coater outside the lab which is > available for spin coating of conductive materials. There are some > nicer ones in CPIMA, MatSci and ME labs. > > 2. Wafers with nanoparticles and nanowires adhered to them can > generally be processed as "gold-contaminated" substrates. As you say, > van der Waals holds them down through most processing, including spin > coating with photoresist. So, the processing you propose should be fine > for the most part. The only question I have is with the ASML. As you > know, the ASML system belongs to ASML, and they have the final word as > to what kind of materials are OK to process in their tool. Ed -- have > nanotubes been OK'ed on the ASML? > > Mary > > John Ross Jameson wrote: > > Dear SpecMat, > > > > I'd like to do some processing of carbon nanotubes and nanofibers > > in SNF, and I've gotten different answers about what is allowed > > and what isn't. What I'd like to do is bring wafers into the fab > > that have carbon nanotubes or nanofibers sitting horizontally on > > the surface. The nanotubes/fibers would only be held on by van der > > Waal forces. That is enough to keep them from blowing off, but > > not enough to keep them from being rubbed off. I'd like to do a > > lift-off process to pattern metal on top of the nanotubes/fibers, > > using either the ASML or EV aligner. For the metal dep, I'd use > > the innotec or metalica. The lift-off could be done at SNF, or > > elsewhere if necessary. > > > > Would this process be OK to do in SNF? Do I need to check back with > > you if I decide to try another type of nanotube/wire? > > > > Thank you, > > John > > > > > > > From mihuhou at stanford.edu Thu Oct 23 18:43:46 2008 From: mihuhou at stanford.edu (Ying Chen) Date: Thu, 23 Oct 2008 18:43:46 -0700 Subject: Etch polydimethylglutarimide with STS etchers. Message-ID: <015701c93579$f4c27770$4d6318ac@stanford.edu> Dear Sir or Madam, I would like to submit a request to do oxygen plasma etching of polydimethylglutarimide in one of our STS etchers. My contact information: Name: Ying Chen Coral login: mihuhou Phone number: (650) 725-0417 (office), (650) 213-6979 (cell) Email address: mihuhou at stanford.edu My PI: Yoshio Nishi The chemical or material: Common name: PMGI (Polydimethylglutarimide) The MSDS is attached for the Organic Polymer Solution to be spin-coated and cured (Outside of SNF) to generate the PMGI (an organic solid), which is the final state of the material I request to bring in the STS tool. Reason for request: I want to make a porous PMGI template with vertical pores of aspect ratio of >10. Process Flow: (Note: Requests for organo silicon, polystyrene and ITO envolved in this process will be each filed separately.) (1) Outside of SNF: The substrate is platinum, Ti, or indium doped tin oxide (ITO) coated Si wafer; (2) Outside of SNF: The PMGI is spin coated onto the substrate; The block copolymer, containing organo-silicon and polystyrene, is spin coated on top of the PMGI; (3) In SNF: Oxygen plasma etching is used to etch the polystyrene domains and the PMGI below these polystyrene domains; Amount and form: 200~300nm thick of PMGI cured on wafers. Storage: I won't store the PMGI coated samples in SNF. Disposal: Non hazardous. Please Let me know if you need any more information! Thank you! Regards, Ying Chen -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: PMGI.pdf Type: application/octet-stream Size: 69239 bytes Desc: not available URL: From mihuhou at stanford.edu Thu Oct 23 18:47:00 2008 From: mihuhou at stanford.edu (Ying Chen) Date: Thu, 23 Oct 2008 18:47:00 -0700 Subject: Polymethylsiloxane Resin. Message-ID: <016401c9357a$688c09a0$4d6318ac@stanford.edu> Dear Sir or Madam, I would like to submit a request to use polymethylsiloxane resin as etching mask for use in one of our STS etchers. My contact information: Name: Ying Chen Coral login: mihuhou Phone number: (650) 725-0417 (office), (650) 213-6979 (cell) Email address: mihuhou at stanford.edu My PI: Yoshio Nishi The chemical or material: Common name: Polymethylsiloxane resin The MSDS is attached for the Polymethylsiloxane Resin Solution to be spin-coated and cured (Outside of SNF) to generate the polymethylsiloxane resin (a solid), which is the final state of the material I request to bring in the STS tool. Reason for request: I want to make a porous PMGI template with vertical pores of aspect ratio of >10. The Polymethylsiloxane I am requesting here serves as the etching mask. Process Flow: (Note: Requests for PMGI, polystyrene and ITO envolved in this process will be each filed separately.) (1) Outside of SNF: The substrate is a platinum, Ti, or indium doped tin oxide (ITO) coated Si wafer or glass sheet; (2) Outside of SNF: The PMGI is spin coated and cured onto the substrate; The block copolymer, containing polymethylsiloxane resin and polystyrene, is spin coated and cured on top of the PMGI; (3) In SNF: Oxygen plasma etching is used to etch the polystyrene domains and the PMGI below these polystyrene domains; Amount and form: 20 thick of Polymethylsiloxane thin film. Storage: I won't store the PMGI coated samples in SNF. Disposal: Non hazardous. Please Let me know if you need any more information! Thank you! Regards, Ying Chen -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: OS.pdf Type: application/octet-stream Size: 165190 bytes Desc: not available URL: From mihuhou at stanford.edu Thu Oct 23 18:48:37 2008 From: mihuhou at stanford.edu (Ying Chen) Date: Thu, 23 Oct 2008 18:48:37 -0700 Subject: Etch alpha-hydroxy, omega-carboxy terminated polystyrene with STS etchers. Message-ID: <016901c9357a$a216b850$4d6318ac@stanford.edu> Dear Sir or Madam, I would like to submit a request to do oxygen plasma etching of polystyrene in one of our STS tools. My contact information: Name: Ying Chen Coral login: mihuhou Phone number: (650) 725-0417 (office), (650) 213-6979 (cell) Email address: mihuhou at stanford.edu My PI: Yoshio Nishi The chemical or material: Common name: alpha-hydroxy, omega-carboxy terminated polystyrene Tradename: N/A CAS numbers: N/A MSDS: Please see the attachment. Storage Group Identifier: G (No special precautions indicated. Store at room temperature. ) Main Hazard Class: Health 0; Flammability: 1; Reactivity: 0 Vendor/manufacturer info: Manufacturer name: Polymer Source Inc. Address: 124 Avro Street, Dorval (Montreal), QC, H9P 2X8, Canada For information, call: 1-866-422-9842, 514-421-5517 Emergency Number: 1-514-708-4114 Email: contact at polymersource.com Reason for request: I want to make a porous PMGI template with vertical pores of aspect ratio of >10. The polystyrene I am requesting here serves as the sacrificial material in the etching mask. Process Flow: (Note: Requests for organo silicon, PMGI and ITO envolved in this process will be each filed separately.) (1) Outside of SNF: The substrate is a platinum, Ti, or indium doped tin oxide (ITO) coated Si wafer or glass sheet; (2) Outside of SNF: The PMGI is spin coated and cured onto the substrate; The block copolymer, containing organo-silicon and polystyrene, is spin coated and cured on top of the PMGI; (3) In SNF: Oxygen plasma etching is used to etch the polystyrene domains and the PMGI below these polystyrene domains; Amount and form: Spherical polystyrene domain of 20nm diameter in a ~20nm thick di-block copolymer layer. Storage: I won't store the PMGI coated samples in SNF. Disposal: Non hazardous. Please Let me know if you need any more information! Thank you! Regards, Ying Chen -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: PS.pdf Type: application/octet-stream Size: 98540 bytes Desc: not available URL: From junjun at twincreekstechnologies.com Mon Oct 27 14:11:31 2008 From: junjun at twincreekstechnologies.com (Junjun) Date: Mon, 27 Oct 2008 14:11:31 -0700 Subject: Fwd: request for new sputtering target materials for Metalica References: <37B0FB1B-AEB6-4719-AE17-21997D86AEED@twincreekstechnologies.com> Message-ID: <3C0BF8C1-102C-42B6-9477-CADF31CE3E66@twincreekstechnologies.com> Hi, I'm wondering if a decision will be made soon about this request. To make it easier I plan to bring in only two solid alloy targets: TiAl3 and TaAl3. Please let me the status. I've ordered the targets which will be ready in a week. Thanks a lot! Junjun ???? iPhone ????????? > ???: Wu Junjun > ??: October 20, 2008 2:27:19 PM PDT > ???: SpecMat at snf.stanford.edu > ??: request for new sputtering target materials for Metalica > > 1. Contact information > Junjun Wu; Coral login: junjun; phone: 408-759-1426; Company: Twin > Creeks Technologies > > 2. Material > TiAl, TiAl3, TaAl, TaAl3 alloys in sintered disk forms. 1" in > diameter and 1/8" in thickness. These are expected to be refractory > alloys. > > 3. Vendor info > ACI Alloys, phone: 408-259-7337. www.acialloys.com > > 4. Reason for request > Use as metal contact to silicon. Not available at SNF. > > 5. Process flow > metal deposit on silicon with Metalica -> bond to Pyrex glass with > ev bond -> heat treat in RTAGAAS > > 6. Amount and form > 1 piece of target each in disk form that works as target for Metalica. > > 7. Storage > It will be stored in the area assigned to Twin Creeks. They are non > reactive alloys. > > 8. Disposal > We will bring them back to Twin Creeks site for disposal if needed. > > Thanks for taking the time to consider this request. Please let me > know your decision as soon as you can since I need to decide to > place an order with the vendor or not in the next couple of days. > > Junjun Wu > Twin Creeks Technologies > (cell) 408 - 759 -1426 > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From edmyers at stanford.edu Mon Oct 27 16:58:47 2008 From: edmyers at stanford.edu (Ed Myers) Date: Mon, 27 Oct 2008 16:58:47 -0700 Subject: Fwd: request for new sputtering target materials for Metalica In-Reply-To: <3C0BF8C1-102C-42B6-9477-CADF31CE3E66@twincreekstechnologie s.com> References: <37B0FB1B-AEB6-4719-AE17-21997D86AEED@twincreekstechnologies.com> <3C0BF8C1-102C-42B6-9477-CADF31CE3E66@twincreekstechnologies.com> Message-ID: <6.2.5.6.2.20081027165533.030384d0@stanford.edu> Junjun, The three materials you have listed should be compatible with the metalic sputter system. Please let Jeannie know the first time you plan on running any of these targets. We will also need a copy of the MSDS for each of the targets. Regards, Ed At 02:11 PM 10/27/2008, Junjun wrote: >Hi, I'm wondering if a decision will be made soon about this >request. To make it easier I plan to bring in only two solid alloy >targets: TiAl3 and TaAl3. >Please let me the status. I've ordered the targets which will be >ready in a week. >Thanks a lot! >Junjun > > > >>Wu Junjun >><junjun at twincreekstechnologies.com> >>October 20, 2008 2:27:19 PM PDT >>SpecMat at snf.stanford.edu >>request for new sputtering target materials for Metalica >> >>1. Contact information >>Junjun Wu; Coral login: junjun; phone: 408-759-1426; Company: Twin >>Creeks Technologies >> >>2. Material >>TiAl, TiAl3, TaAl, TaAl3 alloys in sintered disk forms. 1" in >>diameter and 1/8" in thickness. These are expected to be refractory alloys. >> >>3. Vendor info >>ACI Alloys, phone: 408-259-7337. www.acialloys.com >> >>4. Reason for request >>Use as metal contact to silicon. Not available at SNF. >> >>5. Process flow >>metal deposit on silicon with Metalica -> bond to Pyrex glass with >>ev bond -> heat treat in RTAGAAS >> >>6. Amount and form >>1 piece of target each in disk form that works as target for Metalica. >> >>7. Storage >>It will be stored in the area assigned to Twin Creeks. They are non >>reactive alloys. >> >>8. Disposal >>We will bring them back to Twin Creeks site for disposal if needed. >> >>Thanks for taking the time to consider this request. Please let me >>know your decision as soon as you can since I need to decide to >>place an order with the vendor or not in the next couple of days. >> >>Junjun Wu >>Twin Creeks Technologies >>(cell) 408 - 759 -1426 >> >> From junjun at twincreekstechnologies.com Tue Oct 28 07:31:44 2008 From: junjun at twincreekstechnologies.com (junjun wu) Date: Tue, 28 Oct 2008 07:31:44 -0700 Subject: Fwd: request for new sputtering target materials for Metalica In-Reply-To: <6.2.5.6.2.20081027165533.030384d0@stanford.edu> References: <37B0FB1B-AEB6-4719-AE17-21997D86AEED@twincreekstechnologies.com> <3C0BF8C1-102C-42B6-9477-CADF31CE3E66@twincreekstechnologies.com> <6.2.5.6.2.20081027165533.030384d0@stanford.edu> Message-ID: Hi Ed, Here is a link to MSDS of TaAl3. http://asp.cerac.com/CatalogNet/default.aspx?p=msdsFile&msds=m001192.htm We are using sintered target. So don't worry about the powder mentioned in the MSDS. Here is a link to MSDS of TiAl3. http://asp.cerac.com/CatalogNet/default.aspx?p=msdsFile&msds=m001365.htm Please let me know if you have any other questions. Thanks, Junjun On Mon, Oct 27, 2008 at 4:58 PM, Ed Myers wrote: > Junjun, > > The three materials you have listed should be compatible with the metalic > sputter system. Please let Jeannie know the first time you plan on running > any of these targets. We will also need a copy of the MSDS for each of the > targets. > > Regards, > Ed > > > At 02:11 PM 10/27/2008, Junjun wrote: > >> Hi, I'm wondering if a decision will be made soon about this request. To >> make it easier I plan to bring in only two solid alloy targets: TiAl3 and >> TaAl3. >> Please let me the status. I've ordered the targets which will be ready in >> a week. >> Thanks a lot! >> Junjun >> >> >> >> Wu Junjun < >>> junjun at twincreekstechnologies.com> >>> October 20, 2008 2:27:19 PM PDT >>> SpecMat at snf.stanford.edu >>> request for new sputtering target materials for Metalica >>> >>> 1. Contact information >>> Junjun Wu; Coral login: junjun; phone: 408-759-1426; Company: Twin Creeks >>> Technologies >>> >>> 2. Material >>> TiAl, TiAl3, TaAl, TaAl3 alloys in sintered disk forms. 1" in diameter >>> and 1/8" in thickness. These are expected to be refractory alloys. >>> >>> 3. Vendor info >>> ACI Alloys, phone: 408-259-7337. >>> www.acialloys.com >>> >>> 4. Reason for request >>> Use as metal contact to silicon. Not available at SNF. >>> >>> 5. Process flow >>> metal deposit on silicon with Metalica -> bond to Pyrex glass with ev >>> bond -> heat treat in RTAGAAS >>> >>> 6. Amount and form >>> 1 piece of target each in disk form that works as target for Metalica. >>> >>> 7. Storage >>> It will be stored in the area assigned to Twin Creeks. They are non >>> reactive alloys. >>> >>> 8. Disposal >>> We will bring them back to Twin Creeks site for disposal if needed. >>> >>> Thanks for taking the time to consider this request. Please let me know >>> your decision as soon as you can since I need to decide to place an order >>> with the vendor or not in the next couple of days. >>> >>> Junjun Wu >>> Twin Creeks Technologies >>> (cell) 408 - 759 -1426 >>> >>> >>> > > -- Junjun Wu Twin Creeks Technologies Phone: 408-759-1426 Fax: 408-986-9142 -------------- next part -------------- An HTML attachment was scrubbed... URL: From info at fabsurplus.com Tue Oct 28 11:27:44 2008 From: info at fabsurplus.com (SDI-Fabsurplus) Date: Tue, 28 Oct 2008 18:27:44 +0000 (GMT) Subject: Fabsurplus.com used equipment update October 28th 2008 Message-ID: <27902820.1225218587349.JavaMail.root@server1.fabsurplus.com> SDI/FABSURPLUS NEWS OCTOBER 2008 ******************************** October Message from Steve Howe, SDI-Fabsurplus CEO and owner ************************************************************* "Dear Friends and Clients, "Have you considered used equipment as a cost-reduction solution ? The low cost of used equipment allows you to squeeze that much-needed equipment purchase into your maintanence budget and boost capacity even in a downturn to overtake your competitors. "At Fabsurplus.com, we can offer systems from KLA and Nikon (And other OEMs) completely refurbished and guaranteed functional to OEM specs as well as tools suitable for parts harvesting, allowing you to pick up high dollar items like robots for a fraction of the OEM price. "Right now, "cash is king" so if you want to turn you equipment into cash flow, please send us a list and we will remarket it completely free of charge. We are also experienced in running auctions. "Fabsurplus.com is also excited to announce that we have become representatives in Europe for "Glow Research" plasma surface treatment solutions (www.glowresearch.org). These extremely cost-effective, benchtop, compact gas plasma treatment systems are ideal for R and D applications where a safe and reliable plasma source is needed for cleaning, surface modification and sterilization. Sincerely, Stephen Howe (Owner) Interested to become a fabsurplus.com representative ? E-mail us your CV today at info at fabsurplus.com HOT ITEMS FOR SALE FROM SDI/FABSURPLUS: *************************************** 21964 Complete fab line, 150 mm http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=21964 21396 Complete fab line, 100 mm http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=21396 21127 Accretech/TSK APM 90A Prober 11/97 http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=21127 QTY 3 available 21594 Applied Materials Endura 5500 Endura IMP (4 PVD Chambers) http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=21594 16433 Applied Materials Producer F-TEOS TWIN http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=16433 21525 Glow Research Auto Glow Plasma surface treatment equipment http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=21525 21266 Hitachi S3000N Scanning Electron Microscope with EDX 06/04 http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=21266 21839 HITACHI S9380 CD SEM http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=21839 21342 KLA Tencor Archer 10XT+ Registration Tool http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=21342 14807 KLA Tencor EV300 Defect Review SEM 06/00 http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=14807 20671 KLA Tencor UV1250SE Thin film measurement system 1996 http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=20671 17599 Nikon NSR S204B DUV 300mm stepper for sale - LOW PRICE http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=17599 These tools can be offered completely refurbished with install and warranty 21867 Novellus Concept 3 Inova XT PVD barrier seed for Copper Damascene http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=21867 20268 SEKISUI SIGMA 200 K1 Antistatic 200 MM Wafer shipping boxes 07/06 http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=20268 21064 TEL MB2 730 HT HT CVD SYSTEM 09/96 http://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=21064 WANTED FOR PURCHASE ******************* KLA Spectra FX200: With 190Se option KLA 2135 XP budget:100k usd KLA 2365 User Interface Nanometrics METRA 7200 Bench Top Spin Coater 6? Hot Plate 8? Buehler Ecomet 3 Polisher CE marked Nikon G6 Stepper 5? reticle 6? Wafer Keithly S425 Tester Leica INS2000 review station Manual Probe station complete and working condition. Systemation MT30 Tape & Reel Laser Marker for Packages manual machine. Karl Suss MA150 Mask Aligner Karl Suss PM8 Probe station SELL YOUR SURPLUS EQUIPMENT If you have under-used equipment and you would like SDI/Fabsurplus to assist you in selling it please send the following list of requirements and SDI/Fabsurplus will sell your items at no charge to you: Manufacture: Model: Vintage: Condition: Configuration: Warranty (If any): Location: Pictures: Lowest acceptable price: The equipment can now also be posted directly to our website. Send a mail to anegrini at fabsurplus.com and ask us for a username and a password and we will enable acess to our website to post items. Thank you, Stephen Howe CEO, SDI-Fabsurplus Group c/o SDI Semiconductor Instruments Srl Via Rocco Galdieri, 6 Napoli 80123 Italy Office: (Naples) Italy (39) 081 575 0506 Mobile: Italy (39) 335 710 7756 Fax: Italy (39) 066 051 3344 showe at fabsurplus.com Skype: Stephencshowe http://www.fabsurplus.com A MEMBER OF SEMI Important Notice: This message is intended for the attention of the person or organization to which it has been addressed. It may contain information that is confidential, proprietary and/or exempt from disclosure by law. If you have received this message in error please be aware that the sender does not waive any confidentiality, ownership rights or privilege applicable to it. You are therefore strictly prohibited to disseminate, distribute or copy this message in any way. This message may be considered an advertisement or solicitation under U.S.law. If you would like to opt-out of receiving future commercial e-mail marketing messages from the sender, please send a message to the following e-mail address with the word "REMOVE" in the subject line to: info at fabsurplus.com -------------- next part -------------- A non-text attachment was scrubbed... Name: Fabsurplus_Sales_28_Oct_08.xls Type: application/octet-stream Size: 854528 bytes Desc: not available URL: From mtang at stanford.edu Tue Oct 28 14:58:27 2008 From: mtang at stanford.edu (Mary Tang) Date: Tue, 28 Oct 2008 14:58:27 -0700 Subject: [POSSIBLE VIRUS:###] [Fwd: Fwd: New Material Request] Message-ID: <22671_1225231106_49078B01_22671_245_1_49078B03.9090200@stanford.edu> Hi SpecMat'ers -- Neil made this request several months ago and now his material is here. He is requesting that ALD deposited wafers be processed through litho, then metallica for gold liftoff, then through the RTAgaas. I didn't really see a problem with the first two steps, but wasn't sure about the last. As I understand it, the PbS is stable to fairly high temperatures (higher than what they plan to use.) So, I would think it would be OK, but am not sure what the GaAs community thinks. I do think, though, that we'll be getting a lot more requests like this from the solar groups... What do you think? Can we give Neil an answer today? Mary -------------- next part -------------- An embedded message was scrubbed... From: Neil Dasgupta Subject: Fwd: New Material Request Date: Tue, 28 Oct 2008 13:36:47 -0700 (PDT) Size: 144157 URL: From mtang at stanford.edu Tue Oct 28 16:30:30 2008 From: mtang at stanford.edu (Mary Tang) Date: Tue, 28 Oct 2008 16:30:30 -0700 Subject: [POSSIBLE VIRUS:###] [Fwd: Fwd: New Material Request] Message-ID: <24012_1225236630_4907A096_24012_2343_1_4907A096.3030202@stanford.edu> Heads up -- Another request from Neil -- he wants to do the same with ZnS. I've asked him for an MSDS, info about vapor pressure, and that he submit a proper SpecMat request for it. M -------------- next part -------------- An embedded message was scrubbed... From: Neil Dasgupta Subject: Fwd: New Material Request Date: Tue, 28 Oct 2008 13:36:47 -0700 (PDT) Size: 144157 URL: From chris.detrick at global-fab.com Tue Oct 28 23:38:56 2008 From: chris.detrick at global-fab.com (Christopher Detrick) Date: Wed, 29 Oct 2008 02:38:56 -0400 (EDT) Subject: Equipment Available for immediate sale Message-ID: <1102300970293.1101401002153.9044.6.13023546@scheduler> G-Fab LOGO [http://rs6.net/tn.jsp?e=00103Lw-Y5GLz3NrUZdY47luDZGF226y-7znXjEjEd-i4sC6IpIdATLc4S2s5T3WvANW09IoaAnYaB9nOG-1m9Sr4dgjLDnH2SUcjCnZSjoaCiXtCeK3eQU0Q==] ~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ Global Fab Surplus LLC [http://rs6.net/tn.jsp?e=00103Lw-Y5GLz3NrUZdY47luDZGF226y-7znXjEjEd-i4sC6IpIdATLc4S2s5T3WvANW09IoaAnYaB9nOG-1m9Sr4dgjLDnH2SUcjCnZSjoaCiXtCeK3eQU0Q==](G-Fab) has ended our October auction and it was a success. Below is a list of the equipment that was not sold. If you have any interest in these please feel free to contact us right away. Click here for specs and pictures [http://rs6.net/tn.jsp?e=00103Lw-Y5GLz2T5fsM8GBbYLJiJqzUf740reXcOhFG3tjcTGY0gtcfF83ee64Hw6guO9Ejff3LSOr48fyzQV0J50MSr526nO1cFh3zEz1Ddt2MEp1Q4zyfu3DwcF_qO60Dh1xH-fLID9o2dUrEPGQU2YK3aGA4wjir]. Equipment list Description * IPEC 372m CMP (Very Clean) * IPEC 372m CMP (Very Clean) * LAm Rainbow 4428 (In like new condition) * BioRad/Accent Q7 overlay system * SVG 90s I-line track * SVG 90s I-line track * Teradyne T666 Static tester * Ecosys Exhaust scrubber * 3 palets of back end spare parts (Inventory list available) Also available are hundreds of other equipment as listed on our website at www.global-fab.com [http://rs6.net/tn.jsp?e=00103Lw-Y5GLz3NrUZdY47luDZGF226y-7znXjEjEd-i4sC6IpIdATLc4S2s5T3WvANW09IoaAnYaB9nOG-1m9Sr4dgjLDnH2SUcjCnZSjoaCiXtCeK3eQU0Q==]We can be contacted at: Chris Detrick California office (805) 215-9188 chris.detrick at global-fab.com David Lee Colorado office (719) 229-6066 support at global-fab.com ~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ Global Fab Surplus Semiconductor Equipment LLC [http://rs6.net/tn.jsp?e=00103Lw-Y5GLz3NrUZdY47luDZGF226y-7znXjEjEd-i4sC6IpIdATLc4S2s5T3WvANW09IoaAnYaB9nOG-1m9Sr4dgjLDnH2SUcjCnZSjoaCiXtCeK3eQU0Q==], provides surplus, used, rebuilt and refurbished semiconductor process equipment to integrated device manufacturers, wafer foundries, research and development sites and to the semiconductor refurbishing and rebuilding community. We buy and sell used semiconductor equipment, including backend, front end and special application tools and toolsets. Visit us online at: www.global-fab.com [http://rs6.net/tn.jsp?e=00103Lw-Y5GLz3NrUZdY47luDZGF226y-7znXjEjEd-i4sC6IpIdATLc4S2s5T3WvANW09IoaAnYaB9nOG-1m9Sr4dgjLDnH2SUcjCnZSjoaCiXtCeK3eQU0Q==] for a complete list of tools available. ~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ Forward email http://ui.constantcontact.com/sa/fwtf.jsp?m=1101401002153&ea=specmat at snf.stanford.edu&a=1102300970293 This email was sent to specmat at snf.stanford.edu by chris.detrick at global-fab.com. Update Profile/Email Address http://visitor.constantcontact.com/d.jsp?v=001RO3dPrXHwIHjNc18qg2uYpS-p4D8dFWv7neJTU99K03axRiQfkM6G0JdyORx9c4fzafztCdx2sg%3D&p=oo Instant removal with SafeUnsubscribe(TM) http://visitor.constantcontact.com/d.jsp?v=001RO3dPrXHwIHjNc18qg2uYpS-p4D8dFWv7neJTU99K03axRiQfkM6G0JdyORx9c4fzafztCdx2sg%3D&p=un Privacy Policy: http://ui.constantcontact.com/roving/CCPrivacyPolicy.jsp Global Fab Surplus | 195 Kirkstone Lane | Colorado Springs | CO | 80906 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Fri Oct 31 10:50:47 2008 From: mtang at stanford.edu (Mary Tang) Date: Fri, 31 Oct 2008 10:50:47 -0700 Subject: [POSSIBLE VIRUS:###] [Fwd: Re: Hi!] Message-ID: <3981_1225475445_490B4575_3981_7812_1_490B4577.2080709@stanford.edu> Hi all -- I'm assuming that PbS is OK? Actually, I believe Jim Kruger/Twin Creeks is using this (but the MRC and litho only, I think.) If there are no issues, any problems if we go ahead and approve this by end of today? Mary -------------- next part -------------- An embedded message was scrubbed... From: Neil Dasgupta Subject: Re: Hi! Date: Fri, 31 Oct 2008 09:41:59 -0700 (PDT) Size: 47059 URL: