request for new sputtering target materials for Metalica
mtang at stanford.edu
Tue Oct 21 08:19:09 PDT 2008
No problems with this request, I take it? How do people feel about
sodium in rtagaas? (from the pyrex). Has anyone gotten back to them?
Wu Junjun wrote:
> 1. Contact information
> Junjun Wu; Coral login: junjun; phone: 408-759-1426; Company: Twin
> Creeks Technologies
> 2. Material
> TiAl, TiAl3, TaAl, TaAl3 alloys in sintered disk forms. 1" in diameter
> and 1/8" in thickness. These are expected to be refractory alloys.
> 3. Vendor info
> ACI Alloys, phone: 408-259-7337. www.acialloys.com
> 4. Reason for request
> Use as metal contact to silicon. Not available at SNF.
> 5. Process flow
> metal deposit on silicon with Metalica -> bond to Pyrex glass with ev
> bond -> heat treat in RTAGAAS
> 6. Amount and form
> 1 piece of target each in disk form that works as target for Metalica.
> 7. Storage
> It will be stored in the area assigned to Twin Creeks. They are non
> reactive alloys.
> 8. Disposal
> We will bring them back to Twin Creeks site for disposal if needed.
> Thanks for taking the time to consider this request. Please let me
> know your decision as soon as you can since I need to decide to place
> an order with the vendor or not in the next couple of days.
> Junjun Wu
> Twin Creeks Technologies
> (cell) 408 - 759 -1426
More information about the specmat