request for new sputtering target materials for Metalica

Mary Tang mtang at stanford.edu
Tue Oct 21 08:19:09 PDT 2008


No problems with this request, I take it?  How do people feel about 
sodium in rtagaas?  (from the pyrex).  Has anyone gotten back to them?

Mary

Wu Junjun wrote:
> 1. Contact information
> Junjun Wu; Coral login: junjun; phone: 408-759-1426; Company: Twin 
> Creeks Technologies
>
> 2. Material
> TiAl, TiAl3, TaAl, TaAl3 alloys in sintered disk forms. 1" in diameter 
> and 1/8" in thickness. These are expected to be refractory alloys.
>
> 3. Vendor info
> ACI Alloys, phone: 408-259-7337. www.acialloys.com 
> <http://www.acialloys.com>
>
> 4. Reason for request
> Use as metal contact to silicon. Not available at SNF.
>
> 5. Process flow
> metal deposit on silicon with Metalica -> bond to Pyrex glass with ev 
> bond -> heat treat in RTAGAAS
>
> 6. Amount and form
> 1 piece of target each in disk form that works as target for Metalica.
>
> 7. Storage
> It will be stored in the area assigned to Twin Creeks. They are non 
> reactive alloys.
>
> 8. Disposal
> We will bring them back to Twin Creeks site for disposal if needed.
>
> Thanks for taking the time to consider this request. Please let me 
> know your decision as soon as you can since I need to decide to place 
> an order with the vendor or not in the next couple of days.
>
> Junjun Wu
> Twin Creeks Technologies
> (cell) 408 - 759 -1426
>
>
>




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