Fwd: request for new sputtering target materials for Metalica

Ed Myers edmyers at stanford.edu
Mon Oct 27 16:58:47 PDT 2008


The three materials you have listed should be compatible with the 
metalic sputter system.  Please let Jeannie know the first time you 
plan on running any of these targets.  We will also need a copy of 
the MSDS for each of the targets.


At 02:11 PM 10/27/2008, Junjun wrote:
>Hi, I'm wondering if a decision will be made soon about this 
>request. To make it easier I plan to bring in only two solid alloy 
>targets: TiAl3 and TaAl3.
>Please let me the status. I've ordered the targets which will be 
>ready in a week.
>Thanks a lot!
>>Wu Junjun 
>><<mailto:junjun at twincreekstechnologies.com>junjun at twincreekstechnologies.com>
>>October 20, 2008 2:27:19 PM PDT
>><mailto:SpecMat at snf.stanford.edu>SpecMat at snf.stanford.edu
>>request for new sputtering target materials for Metalica
>>1. Contact information
>>Junjun Wu; Coral login: junjun; phone: 408-759-1426; Company: Twin 
>>Creeks Technologies
>>2. Material
>>TiAl, TiAl3, TaAl, TaAl3 alloys in sintered disk forms. 1" in 
>>diameter and 1/8" in thickness. These are expected to be refractory alloys.
>>3. Vendor info
>>ACI Alloys, phone: 408-259-7337. <http://www.acialloys.com>www.acialloys.com
>>4. Reason for request
>>Use as metal contact to silicon. Not available at SNF.
>>5. Process flow
>>metal deposit on silicon with Metalica -> bond to Pyrex glass with 
>>ev bond -> heat treat in RTAGAAS
>>6. Amount and form
>>1 piece of target each in disk form that works as target for Metalica.
>>7. Storage
>>It will be stored in the area assigned to Twin Creeks. They are non 
>>reactive alloys.
>>8. Disposal
>>We will bring them back to Twin Creeks site for disposal if needed.
>>Thanks for taking the time to consider this request. Please let me 
>>know your decision as soon as you can since I need to decide to 
>>place an order with the vendor or not in the next couple of days.
>>Junjun Wu
>>Twin Creeks Technologies
>>(cell) 408 - 759 -1426

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