Fwd: request for new sputtering target materials for Metalica

junjun wu junjun at twincreekstechnologies.com
Tue Oct 28 07:31:44 PDT 2008


Hi Ed,
Here is a link to MSDS of TaAl3.
http://asp.cerac.com/CatalogNet/default.aspx?p=msdsFile&msds=m001192.htm We
are using sintered target. So don't worry about the powder mentioned in the
MSDS.

Here is a link to MSDS of TiAl3.
http://asp.cerac.com/CatalogNet/default.aspx?p=msdsFile&msds=m001365.htm

Please let me know if you have any other questions.

Thanks,

Junjun

On Mon, Oct 27, 2008 at 4:58 PM, Ed Myers <edmyers at stanford.edu> wrote:

> Junjun,
>
> The three materials you have listed should be compatible with the metalic
> sputter system.  Please let Jeannie know the first time you plan on running
> any of these targets.  We will also need a copy of the MSDS for each of the
> targets.
>
> Regards,
> Ed
>
>
> At 02:11 PM 10/27/2008, Junjun wrote:
>
>> Hi, I'm wondering if a decision will be made soon about this request. To
>> make it easier I plan to bring in only two solid alloy targets: TiAl3 and
>> TaAl3.
>> Please let me the status. I've ordered the targets which will be ready in
>> a week.
>> Thanks a lot!
>> Junjun
>>
>>
>>
>>  Wu Junjun <<mailto:junjun at twincreekstechnologies.com>
>>> junjun at twincreekstechnologies.com>
>>> October 20, 2008 2:27:19 PM PDT
>>> <mailto:SpecMat at snf.stanford.edu>SpecMat at snf.stanford.edu
>>> request for new sputtering target materials for Metalica
>>>
>>> 1. Contact information
>>> Junjun Wu; Coral login: junjun; phone: 408-759-1426; Company: Twin Creeks
>>> Technologies
>>>
>>> 2. Material
>>> TiAl, TiAl3, TaAl, TaAl3 alloys in sintered disk forms. 1" in diameter
>>> and 1/8" in thickness. These are expected to be refractory alloys.
>>>
>>> 3. Vendor info
>>> ACI Alloys, phone: 408-259-7337. <http://www.acialloys.com>
>>> www.acialloys.com
>>>
>>> 4. Reason for request
>>> Use as metal contact to silicon. Not available at SNF.
>>>
>>> 5. Process flow
>>> metal deposit on silicon with Metalica -> bond to Pyrex glass with ev
>>> bond -> heat treat in RTAGAAS
>>>
>>> 6. Amount and form
>>> 1 piece of target each in disk form that works as target for Metalica.
>>>
>>> 7. Storage
>>> It will be stored in the area assigned to Twin Creeks. They are non
>>> reactive alloys.
>>>
>>> 8. Disposal
>>> We will bring them back to Twin Creeks site for disposal if needed.
>>>
>>> Thanks for taking the time to consider this request. Please let me know
>>> your decision as soon as you can since I need to decide to place an order
>>> with the vendor or not in the next couple of days.
>>>
>>> Junjun Wu
>>> Twin Creeks Technologies
>>> (cell) 408 - 759 -1426
>>>
>>>
>>>
>
>


-- 
Junjun Wu
Twin Creeks Technologies
Phone: 408-759-1426
Fax: 408-986-9142
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20081028/b7b3649c/attachment.html>


More information about the specmat mailing list