material request - Stycast W 19 epoxy

[Peter Chen]

Hi specmat,

I checked with Maurice about gryphon. Due to the wafer handling 
arrangement inside, it is best if I use a carrier wafer and kapton 
tape. What remains is qualifying the epoxy for vacuum. Is there a 
protocol for this approval?

(cc'ed to Ed)

Thanks in advance,
-Peter

Peter Chen wrote:
> Mahnaz,
> 
> I have indicated the relevant process steps and equipment below:
> 
> (1) start -- semi-clean wafer with frontside membrane and backside 
> cavities.
> (2) solvent bench -- insert chiplets and fill gaps with epoxy
> (3) solvent bench -- cure on hotplate, 120 degC
> 
> (4a)headway -- polyimide coat
> (4b)svgcoat -- PR coat, likely SPR220-3 or -7
> 
> (5x)karlsuss/evalign -- expose with lift-off mask
> (5y)asml -- expose with lift-off mask
> 
> (6a)manual develop? -- also cure polyimide
> (6b)svgdev -- develop PR
> 
> (7a)gryphon -- sputter aluminum, no heat
> (7b)metallica -- sputter Al or Au (still need to run tests first)
> 
> (8a) p5000etch + TBD -- dry etch back of Al, then O2 etch polyimide
> (8b) solvent bench -- acetone lift-off of PR
> 
> Note that
> (*a) = draft of polyimide flow
> (*b) = PR flow
> 
> I can try to draw cross-sections for some of the steps if that helps 
> visualization.
> 
> Thanks,
> -Peter
> 
> Mahnaz Mansourpour wrote:
>>
>> Hello Peter,
>>
>> I need a process flow with indication of equipment use please that 
>> would be very helpful to me.
>>
>> mahnaz
>> Mary Tang wrote:
>>> Hi Peter --
>>>
>>> So, if I understand correctly, you'd like to glue your chips to a 
>>> silicon wafer with chip pockets and process through litho and 
>>> lift-off?  A few questions:
>>>
>>> 1.  Mixing and applying your epoxy.  These are all liquids, correct?  
>>> Do they require weighing or are they pre-measured?  We don't really 
>>> have the appropriate balance inside the cleanroom for this.  However, 
>>> we do have accurate balances outside the cleanroom (in the 
>>> wafersaw/CMP room.)  Would you be applying the epoxy from a syringe?  
>>> Since the stuff appears to have a long working time, I'd suggest 
>>> mixing outside the cleanroom and bringing the syringe (appropriately 
>>> labeled and enclosed in something like a wafer box) into the 
>>> cleanroom (through the service aisle) and applying it in a solvent 
>>> bench.  You could also mix inside the lab in a solvent bench, but I 
>>> have not yet ordered a replacement balance as yet (though you are 
>>> welcome to nag me about this).  If you will be curing on a hot plate 
>>> for several hours, please be careful to use foil (and not occupy all 
>>> the hot plates at once.)  The concern is that the epoxy will be very 
>>> difficult to remove if it gets on cassettes, bench tops, or hot 
>>> plates, so precautions should be taken to make sure none gets on 
>>> these.  If you want to store the unmixed chemicals in the lab, please 
>>> get the appropriate labels from Mahnaz or me.  The chemicals should 
>>> be stored in the personal Flammables area.  Any solid waste should be 
>>> bagged and placed in one of the Flammables solid waste containers in 
>>> the Litho area.
>>>
>>> 2.  Standard litho flow should be OK for contact alignment.  
>>> Hopefully, your desired resolution isn't better than a couple of 
>>> microns.  If this is for ASML, please check first with Mahnaz, Ed, 
>>> and the ASML engineers.
>>>
>>> 3.  PR lift-off in metalica should be OK.
>>>
>>> 4.  Polyimide lift-off for standard polyimides is not a process we're 
>>> familiar with.  Fully cured polyimide is allowed in the gryphon, but 
>>> is typically then very hard to remove by wet cleans.  Polyimide that 
>>> is not fully cured is not allowed in the gryphon because off gassing 
>>> of volatile organics could contaminate the system.  Polyimide, if I 
>>> remember correctly, is also not typically allowed on the laurell, but 
>>> only on the headway because it does not dissolve in acetone.  If you 
>>> really need polyimide in the gryphon, please provide more details 
>>> (and probably another SpecMat request.)
>>>
>>> Mary
>>>
>>> Peter Chen wrote:
>>>> Hi specmat,
>>>>
>>>> Here is my request:
>>>>
>>>> Material - Stycast W 19 epoxy, Catalyst 11, Catalyst 9, from Emerson 
>>>> and Cuming
>>>>
>>>> Where -
>>>> (1) a litho bench (for the exhaust)
>>>> (2) standard litho flow (after epoxy cure)
>>>> (3) PR lift-off in Metallica
>>>> (4) alternatively, polyimide flow at laurell then lift-off in Gryphon
>>>>
>>>> Process -
>>>> (1) Insertion chiplets into backside of pocketed wafer. Mix, apply, 
>>>> and cure epoxy at a wetbench (for exhaust). Epoxy only used on 
>>>> backside of wafer.
>>>> (2) Downstream to standard litho equipment for other (non-epoxy) 
>>>> litho steps on frontside
>>>> (3) PR lift-off process in Metallica
>>>> (4) polyimide lift-off in Gryphon if that can be approved.
>>>>
>>>> Notes -
>>>> (1) I don't need a litho bench per se, I would just like an approved 
>>>> place that has enough exhaust and 120C hotplate for curing
>>>> (2) Epoxy will be applied by syringe or pipette to chiplet insertion 
>>>> sites only. Goal is to achieve a reconstituted wafer.
>>>> (3) Cured epoxy should easily handle 155C.
>>>> (4) The raw epoxy and catalyst can be stored at room temperature, 
>>>> preferably in lab.
>>>> (5) After chiplet insertion into wafer backside, my process is to 
>>>> have metal lift-off on frontside to complete the electrical 
>>>> contacts. I need to cover some frontside topography, hence sputtering.
>>>>
>>>> I have attached datasheet and MSDS. Please let me know if there are 
>>>> other things I should bring to specmat.
>>>>
>>>> Thanks,
>>>> -Peter Chen
>>>
>>>
> 
>