Nanosys oxide wfs for Litho at SNF

Mahnaz Mansourpour mahnaz at stanford.edu
Wed Apr 15 09:09:09 PDT 2009


Hi Josephine,

In cases like this we ask for TXRF data.

mahnaz

Josephine Suarez wrote:
> Hi Mahnaz,
>
> Oxidation will take place in a class 100 lab.
>
> Josephine
>
> -----Original Message-----
> From: Mahnaz Mansourpour [mailto:mahnaz at stanford.edu] 
> Sent: Tuesday, April 14, 2009 3:36 PM
> To: Josephine Suarez
> Subject: Re: Nanosys oxide wfs for Litho at SNF
>
> Hi
> What is the level of cleannines in your lab?
>
> mahnaz
>
> Josephine Suarez wrote:
>   
>> Hi Mahnaz,
>>
>> We're planning to do in-house oxidation here at Nanosys. These will be
>>     
>
>   
>> <1-1-1> silicon wafers with 100nm thermal oxide. The Litho (SVG spin -
>>     
>
>   
>> ASML - SVG develop) and Etch (AMTETCHER) will still be processed at 
>> SNF. Is this OK or will there be any concerns?
>>
>> Please advise.
>>
>> Thank you,
>>
>> Josephine
>>
>>     



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