final correction...RE: processing of Ti foil in SNF?

[Mary Tang]

Hi all --


This seems OK to me, with the considerations that the Ti would need to 
be mounted to a carrier wafer for innotec and sit on top of a wafer in 
tylan4. Anything else before we get back to Robert?

M


Robert Huang wrote:
>
> OK, I think I will get it right this time – for all 3 units:
>
> 0.25mm=250um (not nm!)=10mils
>
> Sorry for the confusion and multiple emails.
>
> Robert
>
> *From:* Robert Huang
> *Sent:* Tuesday, December 15, 2009 9:05 AM
> *To:* Robert Huang; specmat at snf.stanford.edu
> *Subject:* RE: processing of Ti foil in SNF?
>
> Hi there,
>
> Just one correction to my email, the thickness of the material is 
> 10mils, not 1mil (the dimensions I gave of 0.25mm and 250nm are correct).
>
> Thanks.
>
> Robert
>
> *From:* Robert Huang
> *Sent:* Monday, December 14, 2009 11:32 AM
> *To:* specmat at snf.stanford.edu
> *Subject:* processing of Ti foil in SNF?
>
> SNF Specmat Committee:
>
> I am interested in processing pieces of Ti foil in SNF on the 
> following pieces of equipment:
>
> 1) Wbgeneral for cleaning/rinsing
>
> 2) Innotec for a metal deposition
>
> 3) Tylan 4 (metal-contaminated) for an anneal
>
> The sample size will be <2”x2” (that’s currently the total sample size 
> that I will have) and the thickness is 0.25mm (250nm/1mil) . The 
> source for the material will be Alfa Aesar, and it is 99.99+% purity. 
> Here is Alfa Aesar’s website for this material, and I am attaching 
> their MSDS.
>
> http://www.alfa.com/en/GP100w.pgm?DSSTK=013975
>
> Thanks in advance for taking this into consideration. I am hoping this 
> is straightforward and can be approved quickly given Ti is already a 
> material commonly used throughout SNF, this material is 99.99+% pure 
> Ti, and the tools that I plan to use are all in the Au-contaminated 
> category. If any questions, don’t hesitate to contact me either by 
> email or phone, roberth at quswami.com <mailto:roberth at quswami.com>, 
> 408-854-0450.
>
> Regards,
>
> Robert Huang
>


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu