Qualifying a process plan

Mary Tang mtang at stanford.edu
Wed Feb 25 12:56:53 PST 2009

Hi Jr-Hung --

Good to hear from you! 

A few questions...  Are there any other materials on your wafer when 
silicon bonding is done?  Will any oxidation furnace be OK for fusion 
bonding or does it have to be a Thermco? What are the process conditions 
for your fusion bonding?   Is there additional processing at SNF 
following the fusion bonding?  Do you need to align your wafers for 
bonding at SNF?


Jrhung Tsai wrote:
> Dear SpecMat officer:
>     How are you? This is Jrhung Tsai from Kumetrix Inc. I am planning 
> to do silicon fusion bonding at the lab. My process plan is as following:
>    1. lithography on the silicon wafer at SNF
>    2. DRIE with Alcatel 601 etcher at Kumetrix.
>    3. silicon fusion bonding with annealing at thermoco furnace at SNF.
> I was advised to talk with SpecMat officers about how to qualify the 
> wafers I etch at our company etcher going back to SNF lab. Please 
> advise me what I need to prepare for the qualification of doing my 
> process plan with SNF lab. Thank you.
> Best Regards,
> JrHung
> Kumetrix Inc.
> Tel: 510-476-0950 x 750

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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