use of cyclohexanol at snf
mtang at stanford.edu
Thu Jan 15 15:28:07 PST 2009
Hi all --
What do you think of this SpecMat request? I'm following with a
question about application notes (it looks like that's about the
solubility limit of cyclohexanol in water -- don't know about heated
KOH) and volumes (constant temperature bath? beaker on a hot plate?)
Cyclohexanol is solvent and contact with oxidizers should be avoided --
however, given the low concentration, I think this would be OK to use at
wbgeneral, with the following conditions:
1. No one else may use the bench while this this process is being
done. Bench should be completely reserved, and then blocked off and a
sign posted during processing.
2. Immediately after pouring cyclohexanol, the bottle should be removed
from the bench and returned to storage.
What do you all think?
Wu Junjun wrote:
> 1. Your contact information: Junjun Wu; Coral login: junjun;
> phone: 408-759-1426.
> 2. The chemical or material. Cyclohexanol; CAS # 108-93-0. Here is
> a link to the MSDS http://msds.chem.ox.ac.uk/CY/cyclohexanol.html .
> 3. Vendor/manufacturer info. Sigma-Aldrich; Phone:
> 800-325-3010; Sigma-Aldrich
> Customer Service, PO Box 14508, St. Louis, MO 63178, UNITED STATES
> 4. Reason for request: to make 2% KOH + 5% cyclohexanol etching
> 5. Process Flow: 2%KOH and 5% cyclohexanol solution will be mixed
> and heated to 90C; Si wafers will etched for different times to find
> out the etch rate and surface quality.
> 6. Amount and form. How much will you bring in? Is it solid, powder
> or liquid? (Note: as a general rule, powders are not permitted in the
> cleanroom.) Do you need to mix it to use it? 1L bottle will be
> brought. It is in liquid form. I need to mix it with KOH solution to
> use it.
> 7. Storage: Will you be storing your chemical/material at SNF? Yes.
> It will be stored in the flammable cabinet.
> 8. DIsposal: How will you dispose of any waste or excess chemical
> or material? It will be disposed with KOH in the general acid/base
> drain, unless otherwise required by SNF.
> Junjun Wu
> Twin Creeks Technologies
> (cell) 408 - 759 -1426
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
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