deposite a doped poly-Si on a oxide

sishikaw sishikaw at stanford.edu
Thu Jul 2 11:36:49 PDT 2009


Dear Specmat,

My name is Satoshi Ishikawa(ID:sishikaw).
I am a visiting scholar at Prof. Nishi's group.

I have a question.
I want to deposit a doped poly-silicon by the thermcoploy on a Si-rich oxide 
which is made by STS PECVD.
However, as you know, the contamination level of the thermcopoly is clean 
and STS is gold contamination.
Would you have some methods(e.g a clean process of STS) to do that?

I am looking forward hearing from you.
Thank you in advance.

Sincerely,
Satoshi 
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