DMSO

Marlene Ferrier mferrier at stanford.edu
Tue Jul 14 15:48:16 PDT 2009


Hi,

To follow the instructions of the company doing the ebeam lithography on my wafers I am planning to use Heated Dimethyl Sulfoxide to do a liftoff.

I would like to know where to drain it and if there is any special precaution I should take.

I would really appreciate a feedback from someone familiar with this product as Ed has never used it.

Thanks in advance,

Marlène



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