materials in TylanBPSG

Mary Tang mtang at
Tue Mar 3 13:26:04 PST 2009

What about just before a tube pull?


Jeffrey M. Weisse wrote:
> hi,
> I was wondering if my samples would be allowed in the TylanBPSG.  They are NWs grown top down with silver as a catalyst for a wet etch of HF/H2O2/H2O so they are gold free.  Maurice, the trainer, was unsure if the silver catalyst would contaminate the machine and wanted me to verify it with specmat.
> Thank you,
> Jeff

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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