SiO2 or SixNy for Innotec
Dong Rip Kim
dongrip at stanford.edu
Fri Mar 13 12:24:55 PDT 2009
Hi Specmat committee,
I'm Dong Rip Kim (coral ID: dongrip), a SNF labmember, and I'd like to
deposit SiO2 or SixNy using the e-beam evaporator, Innotec, with my own
sources. I'm wondering if you approve this.
Please let me know.
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