SiO2 or SixNy for Innotec

Dong Rip Kim dongrip at
Fri Mar 13 12:24:55 PDT 2009

Hi Specmat committee,


I'm Dong Rip Kim (coral ID: dongrip), a SNF labmember, and I'd like to
deposit SiO2 or SixNy using the e-beam evaporator, Innotec, with my own
sources. I'm wondering if you approve this.

Please let me know.


Thank you,

Dong Rip

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <>

More information about the specmat mailing list