From nppatil at stanford.edu Tue May 12 14:25:19 2009 From: nppatil at stanford.edu (Nishant Parag Patil) Date: Tue, 12 May 2009 14:25:19 -0700 (PDT) Subject: Scandium MSDS In-Reply-To: <6.2.5.6.2.20071126135431.03de6bf0@stanford.edu> Message-ID: <829730604.3331781242163519033.JavaMail.root@zm06.stanford.edu> Ed, Here are some more Scandium MSDS sheets. Scandium is similar to Erbium which has been approved for Innotec. The Scandium wafers will be limited to gold-contaminated equipment. Thanks, Nishant ----- Original Message ----- From: Ed Myers To: Nishant Patil Sent: Mon, 26 Nov 2007 13:56:28 -0800 (PST) Subject: Re: Scandium MSDS Nishant, Part of a specmat request must include where the material will flow through the fab. Have you read the MSDS sheets? Aren't you worried about the toxicity levels and the potential for explosion? You should also look at other MSDS sources than the second source suppliers. They often understate the material properties. Ed At 09:57 AM 11/26/2007, you wrote: >Hi, > >I would like to use the Innotec to evaporate the metal Scandium. The >MSDS for Scandium and Scandium powder is attached. > >Thanks, >Nishant > -------------- next part -------------- A non-text attachment was scrubbed... Name: 0000634876.pdf Type: application/pdf Size: 57264 bytes Desc: not available URL: -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: 0001068155.pdf Type: application/pdf Size: 52111 bytes Desc: not available URL: -------------- next part -------------- An HTML attachment was scrubbed... URL: From edmyers at stanford.edu Thu May 14 14:14:40 2009 From: edmyers at stanford.edu (Ed Myers) Date: Thu, 14 May 2009 14:14:40 -0700 Subject: spec mat request In-Reply-To: References: Message-ID: <6.2.5.6.2.20090514141341.027b09f8@stanford.edu> Rostam, Go for it. I do not have a Pt target for the SCT. With current Pt prices, it's going to be expensive. Ed At 05:42 PM 5/7/2009, Rostam Dinyari wrote: >Ed, > >My emails bounce back from >spectmat at snf.stanford.edu, so I >sent it to you directly. >I would like to do lift off of Ti/Cr (and maybe later Ti/Pt) in SCT. >I'd appreciate it if you can let me know if it's possible by the end >of next week 5/15. > >The reason for this request is that I want to do lift off of Ti/Cr >(or Ti/Pt) and then be able to deposit LTO400 in tylanbpsg. > >Thanks, >Rostam From kibs at stanford.edu Mon May 18 10:49:29 2009 From: kibs at stanford.edu (Jakob Kibsgaard) Date: Mon, 18 May 2009 10:49:29 -0700 (PDT) Subject: Dihydrogen hexachloroplatinate(IV) hydrate In-Reply-To: <1931480588.3306171242668879963.JavaMail.root@zm05.stanford.edu> Message-ID: <1361761063.3306551242668969501.JavaMail.root@zm05.stanford.edu> Hello, I would like to bring in a water solution containing dihydrogen hexachloroplatinate(IV) hydrate. The details are given below: 1. Your contact information: Name: Jakob Kibsgaard Coral login: kibs phone number 650-739-5617 email address: kibs at stanford.edu PI: Thomas F. Jaramillo 2. The chemical or material: Dihydrogen hexachloroplatinate(IV) hydrate 3. Other names, CAS#, MSDS: Chloroplatinic acid, chloroplatinic acid hexahydrate CAS# 26023-84-7 MSDS is attached 4. Vendor/manufacturer info: Alfa Aesar, A Johnson Matthey Company Johnson Matthey Catalog Company, Inc. 30 Bond Street Ward Hill, MA 01835-8099 Emergency Phone: (978) 521-6300 CHEMTREC: (800) 424-9300 Web Site: www.alfa.com 5. Reason for request: Galvanic deposition of Pt on silicon and siliconcarbide samples using a solution of HF and dihydrogen hexachloroplatinate(IV) hydrate. 6. Process Flow: Experiment 1: Dip silicon/siliconcarbide sample in: (1) 2% hydrofluoric acid (2) Water (3) 1mM dihydrogen hexachloroplatinate(IV) hydrate (4) Water Experiment 2: Dip silicon/siliconcarbide sample in: (1) 2% hydrofluoric acid (2) Solution of 2% hydrofluoric acid and 1mM dihydrogen hexachloroplatinate(IV) hydrate (3) Water Experiment 3: Dip silicon/siliconcarbide sample in: (1) Solution of 2% hydrofluoric acid and 1mM dihydrogen hexachloroplatinate(IV) hydrate (2) Water All experiments will be performed at wbgeneral using the ?gold contaminated labware?. 7. Amount and form. Liquid: The dihydrogen hexachloroplatinate(IV) hydrate will be dissolved in water (concentration: 1mM) before bringing it to SNF. For experiment 2 and 3 the dihydrogen hexachloroplatinate(IV) hydrate solution will be mixed with 2% hydrofluoric acid. 8. Storage: I will not store the chemical at SNF. 9. Disposal: Solutions containing HF: HF drain Any dihydrogen hexachloroplatinate(IV) hydrate solution not mixed with HF will be brought back to our own lab or placed in waste containers and sent out for hazardous waste disposal. Best Regards, Jakob ------------------------- Jakob Kibsgaard, PhD Dept. of Chemical Engineering Keck Science Building, Room 264 Stanford University Stanford, CA 94305-5025 USA Office Phone: +1 650-725-9727 Cell Phone: +1 650-739-5617 e-mail: kibs at stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: MSDS.pdf Type: application/pdf Size: 47300 bytes Desc: not available URL: From mtang at stanford.edu Mon May 18 13:06:47 2009 From: mtang at stanford.edu (Mary Tang) Date: Mon, 18 May 2009 13:06:47 -0700 Subject: Dihydrogen hexachloroplatinate(IV) hydrate In-Reply-To: <1361761063.3306551242668969501.JavaMail.root@zm05.stanford.edu> References: <1361761063.3306551242668969501.JavaMail.root@zm05.stanford.edu> Message-ID: <4A11BFD7.8000207@stanford.edu> Hi Jakob -- A couple of things. First, thanks for recognizing the policy on powders and crystals in the lab and arranging to mix up the chemical outside the cleanroom. (We do have a small bench area outside the lab, if you want to make up your stock solution there.) Second, when you say "galvanic deposition", this generally means you are using a power supply to provide potential energy for the reaction - i.e., electroplating. If this is the case, then we really need to talk in detail about your experimental setup. So, let us know about the power supply -- Thanks, Mary Jakob Kibsgaard wrote: > Hello, > > I would like to bring in a water solution containing dihydrogen hexachloroplatinate(IV) hydrate. The details are given below: > > > 1. Your contact information: > Name: Jakob Kibsgaard > Coral login: kibs > phone number 650-739-5617 > email address: kibs at stanford.edu > PI: Thomas F. Jaramillo > > 2. The chemical or material: > Dihydrogen hexachloroplatinate(IV) hydrate > > 3. Other names, CAS#, MSDS: > Chloroplatinic acid, chloroplatinic acid hexahydrate > CAS# 26023-84-7 > MSDS is attached > > 4. Vendor/manufacturer info: > Alfa Aesar, A Johnson Matthey Company > Johnson Matthey Catalog Company, Inc. > 30 Bond Street > Ward Hill, MA 01835-8099 > Emergency Phone: (978) 521-6300 > CHEMTREC: (800) 424-9300 > Web Site: www.alfa.com > > 5. Reason for request: > Galvanic deposition of Pt on silicon and siliconcarbide samples using a solution of HF and dihydrogen hexachloroplatinate(IV) hydrate. > > 6. Process Flow: > > Experiment 1: > Dip silicon/siliconcarbide sample in: > (1) 2% hydrofluoric acid > (2) Water > (3) 1mM dihydrogen hexachloroplatinate(IV) hydrate > (4) Water > > Experiment 2: > Dip silicon/siliconcarbide sample in: > (1) 2% hydrofluoric acid > (2) Solution of 2% hydrofluoric acid and 1mM dihydrogen hexachloroplatinate(IV) hydrate > (3) Water > > Experiment 3: > Dip silicon/siliconcarbide sample in: > (1) Solution of 2% hydrofluoric acid and 1mM dihydrogen hexachloroplatinate(IV) hydrate > (2) Water > > All experiments will be performed at wbgeneral using the ?gold contaminated labware?. > > 7. Amount and form. > Liquid: The dihydrogen hexachloroplatinate(IV) hydrate will be dissolved in water (concentration: 1mM) before bringing it to SNF. > For experiment 2 and 3 the dihydrogen hexachloroplatinate(IV) hydrate solution will be mixed with 2% hydrofluoric acid. > > 8. Storage: > I will not store the chemical at SNF. > > 9. Disposal: > Solutions containing HF: HF drain > Any dihydrogen hexachloroplatinate(IV) hydrate solution not mixed with HF will be brought back to our own lab or placed in waste containers and sent out for hazardous waste disposal. > > > Best Regards, > Jakob > > ------------------------- > Jakob Kibsgaard, PhD > Dept. of Chemical Engineering > Keck Science Building, Room 264 > Stanford University > Stanford, CA 94305-5025 > USA > > Office Phone: +1 650-725-9727 > Cell Phone: +1 650-739-5617 > e-mail: kibs at stanford.edu -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mtang at stanford.edu Tue May 19 13:04:56 2009 From: mtang at stanford.edu (Mary Tang) Date: Tue, 19 May 2009 13:04:56 -0700 Subject: Dihydrogen hexachloroplatinate(IV) hydrate In-Reply-To: <1361761063.3306551242668969501.JavaMail.root@zm05.stanford.edu> References: <1361761063.3306551242668969501.JavaMail.root@zm05.stanford.edu> Message-ID: <4A1310E8.3030600@stanford.edu> Hi Jakob -- Your request is approved, with the following: 1. To bring your solution into the lab, first make sure to obtain a personal chemicals yellow label (ask Mahnaz, Ed, or me) and log your chemical on the logsheet. Label your chemical. 2. Place your chemical in the top shelf (for personal chemicals) in the chemicals pass-through, from the corridor side (ask a Staff member to open it). You can access the chemical from inside the lab. 3. Please dispose of your non-HF containing solution in a properly labeled hazardous waste container. Follow standard wbgeneral operating procedures (check with Uli if you need a refresher.) I'd suggest making up enough for your experiment and don't bother transporting back to your own lab for disposal. 4. We're assuming these are relatively small amounts we're talking about here (no more than a couple hundred ml or so, not liters), correct? Thanks, Mary Hi Mary, Yes, the term "galvanic deposition" may be misleading, a blunder from my side. I will not require a power supply. The experimental procedure is simply to dip my silicon/silicon-carbide samples in the beaker containing the HF/Dihydrogen hexachloroplatinate(IV) hydrate solution. Best, - Jakob Jakob Kibsgaard wrote: > Hello, > > I would like to bring in a water solution containing dihydrogen hexachloroplatinate(IV) hydrate. The details are given below: > > > 1. Your contact information: > Name: Jakob Kibsgaard > Coral login: kibs > phone number 650-739-5617 > email address: kibs at stanford.edu > PI: Thomas F. Jaramillo > > 2. The chemical or material: > Dihydrogen hexachloroplatinate(IV) hydrate > > 3. Other names, CAS#, MSDS: > Chloroplatinic acid, chloroplatinic acid hexahydrate > CAS# 26023-84-7 > MSDS is attached > > 4. Vendor/manufacturer info: > Alfa Aesar, A Johnson Matthey Company > Johnson Matthey Catalog Company, Inc. > 30 Bond Street > Ward Hill, MA 01835-8099 > Emergency Phone: (978) 521-6300 > CHEMTREC: (800) 424-9300 > Web Site: www.alfa.com > > 5. Reason for request: > Galvanic deposition of Pt on silicon and siliconcarbide samples using a solution of HF and dihydrogen hexachloroplatinate(IV) hydrate. > > 6. Process Flow: > > Experiment 1: > Dip silicon/siliconcarbide sample in: > (1) 2% hydrofluoric acid > (2) Water > (3) 1mM dihydrogen hexachloroplatinate(IV) hydrate > (4) Water > > Experiment 2: > Dip silicon/siliconcarbide sample in: > (1) 2% hydrofluoric acid > (2) Solution of 2% hydrofluoric acid and 1mM dihydrogen hexachloroplatinate(IV) hydrate > (3) Water > > Experiment 3: > Dip silicon/siliconcarbide sample in: > (1) Solution of 2% hydrofluoric acid and 1mM dihydrogen hexachloroplatinate(IV) hydrate > (2) Water > > All experiments will be performed at wbgeneral using the ?gold contaminated labware?. > > 7. Amount and form. > Liquid: The dihydrogen hexachloroplatinate(IV) hydrate will be dissolved in water (concentration: 1mM) before bringing it to SNF. > For experiment 2 and 3 the dihydrogen hexachloroplatinate(IV) hydrate solution will be mixed with 2% hydrofluoric acid. > > 8. Storage: > I will not store the chemical at SNF. > > 9. Disposal: > Solutions containing HF: HF drain > Any dihydrogen hexachloroplatinate(IV) hydrate solution not mixed with HF will be brought back to our own lab or placed in waste containers and sent out for hazardous waste disposal. > > > Best Regards, > Jakob > > ------------------------- > Jakob Kibsgaard, PhD > Dept. of Chemical Engineering > Keck Science Building, Room 264 > Stanford University > Stanford, CA 94305-5025 > USA > > Office Phone: +1 650-725-9727 > Cell Phone: +1 650-739-5617 > e-mail: kibs at stanford.edu -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mtang at stanford.edu Wed May 20 15:01:28 2009 From: mtang at stanford.edu (Mary Tang) Date: Wed, 20 May 2009 15:01:28 -0700 Subject: Magnetic Polymer in Metallica? In-Reply-To: <6fb9796f0905201441s42759d38o429483a808f23f23@mail.gmail.com> References: <6fb9796f0905201441s42759d38o429483a808f23f23@mail.gmail.com> Message-ID: <4A147DB8.2040605@stanford.edu> Hi Nathan -- I don't think this is a problem, but am forwarding to SpecMat, just for the record. Jeannie, Ed, what do you think? Mary Nathan K wrote: > Metal Quality Circle, > > I would like to try sputtering metal using Metallica on my printed > polystyrene-iron composite material (the same material that caused no > trouble in XeF2 (see attached)) on silicon substrates to do metal > liftoff. The polymer shows excellent adhesion to the substrate, so > there should be no particulate problems, withstands temperatures up to > 100C, and is solvent free, so there should be minimal outgassing. Do > you forsee any problems, or can I go ahead and run a test? I would > appreciate your input. > > Regards, > Nathan Klejwa > > > ------------------------------------------------------------------------ > -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From jperez at snf.stanford.edu Thu May 21 07:49:31 2009 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Thu, 21 May 2009 07:49:31 -0700 Subject: Magnetic Polymer in Metallica? In-Reply-To: <4A147DB8.2040605@stanford.edu> References: <6fb9796f0905201441s42759d38o429483a808f23f23@mail.gmail.com> <4A147DB8.2040605@stanford.edu> Message-ID: <6.2.5.6.2.20090521074844.00bb7328@snf.stanford.edu> Hi, I also don't see a problem with this process in Metalica. Jeannie At 03:01 PM 5/20/2009, Mary Tang wrote: >Hi Nathan -- > >I don't think this is a problem, but am forwarding to SpecMat, just >for the record. Jeannie, Ed, what do you think? > >Mary > >Nathan K wrote: >>Metal Quality Circle, >> >>I would like to try sputtering metal using Metallica on my printed >>polystyrene-iron composite material (the same material that caused no >>trouble in XeF2 (see attached)) on silicon substrates to do metal >>liftoff. The polymer shows excellent adhesion to the substrate, so >>there should be no particulate problems, withstands temperatures up to >>100C, and is solvent free, so there should be minimal outgassing. Do >>you forsee any problems, or can I go ahead and run a test? I would >>appreciate your input. >> >>Regards, >>Nathan Klejwa >> >> >>------------------------------------------------------------------------ > > >-- >Mary X. Tang, Ph.D. >Stanford Nanofabrication Facility >CIS Room 136, Mail Code 4070 >Stanford, CA 94305 >(650)723-9980 >mtang at stanford.edu >http://snf.stanford.edu > Jeannie Perez Science and Engineering Technician Stanford Nanofabrication Facility Stanford University Tel: (650) 723-7997 Fax: (650) 725-6278 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Thu May 28 17:24:24 2009 From: mtang at stanford.edu (Mary Tang) Date: Thu, 28 May 2009 17:24:24 -0700 Subject: [Fwd: ErGd/Ox wafers for POCL] Message-ID: <4A1F2B38.2030801@stanford.edu> Hi all -- This is the start of a specmat request from Aleta. As I understand it, these are considered electronics grade clean films. At my request, she looked into TXRF measurements -- I'll forward you her response, which I've just received. Mary -------- Original Message -------- Subject: ErGd/Ox wafers for POCL Date: Wed, 20 May 2009 17:53:28 -0700 From: Aleta Jamora To: Mary Tang Hi Mary, A few weeks ago I asked you about processing some silicon wafers that have a coating of Erbium Gadolinium Oxide on them in the POCL tube. You said that it might be possible on a scheduled basis, if we could provide sufficient and acceptable information about our wafers regarding safety and contamination issues. From what I can remember from our conversation, I need to give you MSDS sheets, information on volatility, and XRF data. We grow single crystal Erbium Gadolinium oxide films on Si wafers using MBE. We have MSDS sheets for Erbium and Gadolinium oxides in thier powdered forms and I am attaching them. there are no MSDS sheets for the single crystal films themselves. If approved we would be processing the wafers at 900 degrees in the POCL tube (the same temperature that the films on the wafers are grown at) and the films are stable at this temperature. From the properties of Erbium and Gadolinium oxides we expect the stability to be much higher. We are working on getting the XRF data to show any potential contaminants. Would you be able to look over the MSDS sheets and let me know what other specific information you might need. Much Thanks, -Aleta -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: erbiumoxide[1].pdf Type: application/pdf Size: 52815 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: gadoliniumoxide[1].pdf Type: application/pdf Size: 48474 bytes Desc: not available URL: From mtang at stanford.edu Thu May 28 17:25:41 2009 From: mtang at stanford.edu (Mary Tang) Date: Thu, 28 May 2009 17:25:41 -0700 Subject: [Fwd: Fwd: FW: TXRF measurements] Message-ID: <4A1F2B85.1070402@stanford.edu> Hi all -- What do you think of glow discharge mass spec as an assay for trace contaminants? I've not a clue. Mary -------- Original Message -------- Subject: Fwd: FW: TXRF measurements Date: Thu, 28 May 2009 17:21:25 -0700 From: Aleta Jamora To: Mary Tang References: Hi Mary, We contacted Evans Analytical Group and asked them if they could do tXRF on one of our rare earth oxide wafers and their response was that it was not an appropriate technique for rare earth oxides as the peaks associated with the rare earth metals drown out any signals from the contaminants that we are looking for. They maintain that the glow discharge mass spec would be the best technique. Here is an EAG link discussing thier GDMS services, it also has some links to technical notes at the bottom. _http://www.eaglabs.com/techniques/analytical_techniques/gdms.php_ When we spoke yesterday you said that the details and conditions of the GDMS analysis could be very different and it is important to know exactly what conditions are used. If we were to provide GDMS analysis data, is there a specific set of conditions that you are looking for so that we can ask Evans to do the way you would like it to be? I am forwarding our correspondance with Evans. Much thanks, -Aleta ---------- Forwarded message ---------- From: *Aleta Jamora* > Date: Thu, May 28, 2009 at 5:05 PM Subject: FW: TXRF measurements To: artyjamo at gmail.com -----Original Message----- From: Lori Bisaha [mailto:lbisaha at eaglabs.com ] Sent: Thursday, May 28, 2009 3:45 PM To: Richard Sewell Cc: Operations Desk at EAG Subject: RE: TXRF measurements Richard, TXRF analysis of a rare earth film is not practical. The rare earths produce numerous peaks and at matrix level, the spectrum is dominated by them. Peaks of elements present at lower levels are either completely obscured or the detection limits are far too high to be useful. You might want to speak to Jim Norberg (408-530-3758) about the specific aim of your analysis and possible alternative methods. Best regards, Lori -----Original Message----- From: Richard Sewell [mailto:richard at translucentinc.com ] Sent: Wednesday, May 27, 2009 5:08 PM To: info Subject: TXRF measurements Hi, I need to get one TXRF measurement done on a 100mm diameter silicon wafer coated with a rare-earth oxide layer. We have an open PO with EAG that this will be charged to. Can you please put me in touch with someone for a quick discussion of the measurement. Regards, Richard -- Richard Sewell Director of Technology, Translucent Inc 952 Commercial Street Palo Alto CA 94303 e-mail richard at translucentinc.com Tel 650-213-9311 x225 Fax 650-213-9511 Cell 650-644-8700 -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Fri May 29 11:47:05 2009 From: mtang at stanford.edu (Mary Tang) Date: Fri, 29 May 2009 11:47:05 -0700 Subject: [Fwd: Fwd: FW: GDMS results] Message-ID: <4A202DA9.2070403@stanford.edu> Hi all -- I got some clarification from Aleta. She says this is GDMS analysis on the starting materials only, but that they can run the same analysis on their deposited MBE films, if we agree this type of analysis provides sufficient confidence that a "good" result will qualify this as acceptable as "clean" material. So, should we go ahead and ask them to get GDMS done on their deposited film to qualify for clean processing at SNF? Mary -------- Original Message -------- Subject: Fwd: FW: GDMS results Date: Thu, 28 May 2009 17:29:07 -0700 From: Aleta Jamora To: Mary Tang References: Hi Mary, We have had some GDMS analysis on our films and the results are attached to this e-mail. I am sending this as an example, we will/can get another GDMS done if the data in this result looks okay to you. I will write up the Spec Mat request as soon as we know (and get) what kind of contamination analysis data will be acceptable for Spec Mat review. thanks, Aleta -----Original Message----- From: Richard Sewell Sent: Thursday, May 28, 2009 5:12 PM To: Aleta Jamora Subject: GDMS results -- Richard Sewell Director of Technology, Translucent Inc 952 Commercial Street Palo Alto CA 94303 e-mail richard at translucentinc.com Tel 650-213-9311 x225 Fax 650-213-9511 Cell 650-644-8700 -- Mary X. 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