Bring processed wafer from ucsb

mctien at berkeley.edu mctien at berkeley.edu
Thu Nov 12 19:16:25 PST 2009


Dear committee,

I’m a postdoc in ucsb, and I’m evaluating a new process  which uses SNF
facility, epi2, in a certain fabrication step.  The wafer will be
processed in UCSB nanofab (http://www.nanotech.ucsb.edu/) first.
Basically, it’s one step of Si etching. I wonder if the wafer can be
accepted in SNF “clean” group equipment.  Please let me know if you need
any more information for your evaluation. Or we can discuss via phone
about the details.

Thank you for your time!

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~
Ming-Chun (Jason) Tien
Post-doctoral Researcher
(805)893-5828
ECE Department
University of California, Santa Barbara





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