Request to use lampoly or p5000 to etch semi-clean wafers

Mary Tang mtang at
Fri Oct 9 08:46:33 PDT 2009

Hi all --

We really need to get back to this question of how we are going to 
accommodate requests for metal-containing materials in clean dry etch 
tools.  This request strikes me as being an incremental step in that 

As for as lampoly is concerned (and I suspect would also apply to 
P5000etch), this seems reasonable.  The EBR margin should be sufficient 
(a wafer without EBR risks sticking to the lampoly clamp ring.)  And the 
clamp is made from alumina, so I don't think there's an appreciable 
contamination risk from whatever trace Al may remain on exposed wafer 

I vote that we OK this request -- with the proviso that we update the 
documentation to describe in detail the rationale and conditions under 
which semi-clean wafers can be processed in lampoly (and p5000etch.)

So...  do we have a quorum?


Nahid Harjee wrote:
> SpecMat,
> I am designing a process to fabricate single crystal silicon 
> cantilevers that are 3 um thick. The narrowest cantilevers are 14 um 
> wide and have 4 "legs" at the clamped end that are 2 um wide. I am 
> trying to select a tool to etch the 3 um of silicon to define the 
> cantilever that will produce straight sidewalls. In the past, I have 
> used stsetch to define wider cantilevers. However, I am concerned that 
> the scalloping resulting from this tool will make it difficult to etch 
> the 2 um legs of the new design. Thus, I am writing to propose that I 
> perform this etch with HBr/Cl2 chemistry in lampoly or p5000. What 
> makes this process non-standard is that my wafers will be semi-clean 
> at this point. The step prior to defining the cantilevers is 
> deposition of 1500 A of Al in gryphon which is then patterned with a 
> wet etch in Al-11. During the Si etch, the Al will never be exposed to 
> the plasma (it will be covered by 3 um of resist). However, there is a 
> chance that there will be trace Al on the exposed Si from the Al-11 
> bath. At the most recent process clinic, Keith Best raised the point 
> that there may be exposed Al in the EBR region of my wafers. In order 
> to minimize this possibility, I can use 5 mm EBR for the Al litho and 
> 2 mm EBR for the cantilever litho, ensuring there's a buffer of 3 mm 
> of resist with no Al below it.
> I look foward to hearing your decision on the proposed process or if 
> there is a tool that is better suited for this process, I welcome any 
> suggestions.
> Thanks,
> nh
> -- 
> Nahid Harjee
> Ph.D. Candidate
> Electrical Engineering
> Stanford University
> 408-761-8651

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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