SiO2 deposition in innotec ebeam evaporator

Mary Tang mtang at stanford.edu
Fri Oct 9 09:20:44 PDT 2009


Hi all -

Did we ever get back to this person?

Mary

Min-Kyo Seo wrote:
> Dear Spec Mat panel,
>
> I am a postdoc in the group of Mark Brongersma in the MSE department.
>
> I would like to ask about innotec ebeam evaporator.
> Can I perform SiO2 deposition?
>
> All the best,
> Min-Kyo Seo
> -----------------------------------------------------------------------------
> Postdoctoral Scholar
> Mark Brongersma's Group
> Department of Materials Science and Engineering
> McCollough Building #216
> Stanford University
> Cell: (650)353-0614  Fax: (650)724-9851
> E-mail: mkseo at stanford.edu; minkyo.seo at gmail.com
>
>   


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




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