SiO2 deposition in innotec ebeam evaporator

Ed Myers edmyers at
Fri Oct 9 10:47:30 PDT 2009

Yes, I exchanged emails with him a month ago.


At 09:20 AM 10/9/2009, Mary Tang wrote:
>Hi all -
>Did we ever get back to this person?
>Min-Kyo Seo wrote:
>>Dear Spec Mat panel,
>>I am a postdoc in the group of Mark Brongersma in the MSE department.
>>I would like to ask about innotec ebeam evaporator.
>>Can I perform SiO2 deposition?
>>All the best,
>>Min-Kyo Seo
>>Postdoctoral Scholar
>>Mark Brongersma's Group
>>Department of Materials Science and Engineering
>>McCollough Building #216
>>Stanford University
>>Cell: (650)353-0614  Fax: (650)724-9851
>>E-mail: mkseo at; minkyo.seo at
>Mary X. Tang, Ph.D.
>Stanford Nanofabrication Facility
>CIS Room 136, Mail Code 4070
>Stanford, CA  94305
>mtang at

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