Ask about perfluorinated solvent

Mary Tang mtang at
Wed Oct 14 15:22:02 PDT 2009

Hi Chien-Yu --

Yes, Teflon AF has been approved for limited use in the lab.  Could you 
please provide some additional details as to the experiments you'd like 
to do?  In other words"  What kind of volumes will be used?  How do you 
plan to dispose of waste and do you need to store unused chemical?  
Where do you plan to process your wafers afterwards?  Do you require a 
hot plate?

One concern about using liquid fluoropolymer in the litho area is the 
very real possibility that it will drip or spray onto surrounding 
surfaces or wafer handling tools and then will be picked up and 
transferred with the touch of a glove.  Resist doesn't stick well to 
this stuff, so this could result in lifting for other people.  Although 
chemicals like this have been allowed at headway2, be prepared for some 
additional training on handling special chemicals like this at this station.


Chien-Yu Chen wrote:
> Hi,
> I'm planning a process that may involve the DuPont Teflon AF (amorphous fluropolymer).  I was told that the Teflon AF is an approved material in SNF, while no related solvent found approved on the website list.  Specifically, the perfluorinated solvent I'm searching for are the 3M Flourinert series, FC-72, FC-75, or FC-77, as suggests from the DuPont Teflon AF Processing and Use Guide [1].
> The major purposes of requesting this solvent are to dilute and to remove Teflon films on standard Si wafers.  The equipments may involved in are wbsolvent and headway2.  Please inform me if these solvent are already approved or any applications need to be done.  Thanks for your help.
> Best regards,
> Chien-Yu Chen
> Coral login: chienyuc
> [1]Dupont Teflon AF Processing and Use Guide
> [2]FC-72 detail(with MSDS datasheet available there, CAS 86508-42-1)

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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