[Fwd: Spin-on transparent conductive layer]
Mary Tang
mtang at stanford.edu
Tue Oct 27 16:37:24 PDT 2009
Hi all --
Here's a request from Scott Andrews, who was a former student here so is
familiar with the concerns.
I think I have some reservations. We've not allowed conductive and
semiconducting nanoparticles solutions at headway2 because the spray off
the wafer edges will dry and the particulates will float around. These
could create problems if the contaminated other people's wafers. We do
allow latex nanoparticle in solution at headway2 because these are
soluble in acetone and removed in sulfuric clean. This stuff contains
silver so it's rather like the conducting nanoparticle problem.
However, unlike CNT's and many other nanoparticles, the standard cleans
will remove possible contaminants.
I'm inclined to OK this, provided Scott is fully aware of the concerns
and makes sure to cleanup and take appropriate precautions (he has been
a conscientious labmember). Does anyone have other concerns? I also
think James should be made aware of this, since headway2 is his
station. What do you think?
Mary
-------- Original Message --------
Subject: Spin-on transparent conductive layer
Date: Tue, 27 Oct 2009 15:07:38 -0700
From: Scott Andrews <scott at reelsolar.com>
To: Mary Tang <mtang at snf.stanford.edu>
Hi Mary,
We would like to use ClearOhm at the headway and hot plates. Attached
are the process notes and MSDS. Has anything similar already been
approved my the specmat committee? I can prep the whole package for
approval, but I seem to remember when I was at Stanford that these had
been tried at SNF. Please let me know if I need to go through the
committee or if you expect any particular concerns.
Thanks,
Scott
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu
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