[Fwd: Spin-on transparent conductive layer]
edmyers at stanford.edu
Wed Oct 28 07:59:54 PDT 2009
I don't see why there should be an exception for this material over
the other nanoparticles we have been excluding. Even if normal
cleans can remove this material, we can not expect the lab members
samples to be compatible with a normal clean.
At 04:37 PM 10/27/2009, Mary Tang wrote:
>Hi all --
>Here's a request from Scott Andrews, who was a former student here
>so is familiar with the concerns.
>I think I have some reservations. We've not allowed conductive and
>semiconducting nanoparticles solutions at headway2 because the spray
>off the wafer edges will dry and the particulates will float
>around. These could create problems if the contaminated other
>people's wafers. We do allow latex nanoparticle in solution at
>headway2 because these are soluble in acetone and removed in
>sulfuric clean. This stuff contains silver so it's rather like the
>conducting nanoparticle problem.
>However, unlike CNT's and many other nanoparticles, the standard
>cleans will remove possible contaminants.
>I'm inclined to OK this, provided Scott is fully aware of the
>concerns and makes sure to cleanup and take appropriate
>precautions (he has been a conscientious labmember). Does anyone
>have other concerns? I also think James should be made aware of
>this, since headway2 is his station. What do you think?
>-------- Original Message --------
>Subject: Spin-on transparent conductive layer
>Date: Tue, 27 Oct 2009 15:07:38 -0700
>From: Scott Andrews <scott at reelsolar.com>
>To: Mary Tang <mtang at snf.stanford.edu>
>We would like to use ClearOhm at the headway and hot plates. Attached
>are the process notes and MSDS. Has anything similar already been
>approved my the specmat committee? I can prep the whole package for
>approval, but I seem to remember when I was at Stanford that these had
>been tried at SNF. Please let me know if I need to go through the
>committee or if you expect any particular concerns.
>Mary X. Tang, Ph.D.
>Stanford Nanofabrication Facility
>CIS Room 136, Mail Code 4070
>Stanford, CA 94305
>mtang at stanford.edu
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