SiO2 deposition in innotec ebeam evaporator

Min-Kyo Seo mkseo at
Tue Sep 8 17:23:05 PDT 2009

Dear Spec Mat panel,

I am a postdoc in the group of Mark Brongersma in the MSE department.

I would like to ask about innotec ebeam evaporator.
Can I perform SiO2 deposition?

All the best,
Min-Kyo Seo
Postdoctoral Scholar
Mark Brongersma's Group
Department of Materials Science and Engineering
McCollough Building #216
Stanford University
Cell: (650)353-0614  Fax: (650)724-9851
E-mail: mkseo at; minkyo.seo at

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